JPS63110042U - - Google Patents

Info

Publication number
JPS63110042U
JPS63110042U JP154587U JP154587U JPS63110042U JP S63110042 U JPS63110042 U JP S63110042U JP 154587 U JP154587 U JP 154587U JP 154587 U JP154587 U JP 154587U JP S63110042 U JPS63110042 U JP S63110042U
Authority
JP
Japan
Prior art keywords
angled surface
carrier
holding
semiconductor
suction hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP154587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP154587U priority Critical patent/JPS63110042U/ja
Publication of JPS63110042U publication Critical patent/JPS63110042U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP154587U 1987-01-08 1987-01-08 Pending JPS63110042U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP154587U JPS63110042U (de) 1987-01-08 1987-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP154587U JPS63110042U (de) 1987-01-08 1987-01-08

Publications (1)

Publication Number Publication Date
JPS63110042U true JPS63110042U (de) 1988-07-15

Family

ID=30779552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP154587U Pending JPS63110042U (de) 1987-01-08 1987-01-08

Country Status (1)

Country Link
JP (1) JPS63110042U (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003077988A (ja) * 2001-09-06 2003-03-14 Nitto Denko Corp 半導体ウエハのマウント方法およびこれに用いるカセット

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003077988A (ja) * 2001-09-06 2003-03-14 Nitto Denko Corp 半導体ウエハのマウント方法およびこれに用いるカセット
JP4748901B2 (ja) * 2001-09-06 2011-08-17 日東電工株式会社 半導体ウエハのマウント方法およびこれに用いるカセット

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