JPS6196535U - - Google Patents
Info
- Publication number
- JPS6196535U JPS6196535U JP18161184U JP18161184U JPS6196535U JP S6196535 U JPS6196535 U JP S6196535U JP 18161184 U JP18161184 U JP 18161184U JP 18161184 U JP18161184 U JP 18161184U JP S6196535 U JPS6196535 U JP S6196535U
- Authority
- JP
- Japan
- Prior art keywords
- quartz boat
- grooves
- positioning
- side plates
- round bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18161184U JPS6196535U (de) | 1984-11-28 | 1984-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18161184U JPS6196535U (de) | 1984-11-28 | 1984-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6196535U true JPS6196535U (de) | 1986-06-21 |
Family
ID=30739155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18161184U Pending JPS6196535U (de) | 1984-11-28 | 1984-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196535U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6398123A (ja) * | 1986-10-15 | 1988-04-28 | Tokai Kounetsu Kogyo Kk | 半導体製造用ウエハ−ボ−トの製法 |
-
1984
- 1984-11-28 JP JP18161184U patent/JPS6196535U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6398123A (ja) * | 1986-10-15 | 1988-04-28 | Tokai Kounetsu Kogyo Kk | 半導体製造用ウエハ−ボ−トの製法 |
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