JPS63108628U - - Google Patents

Info

Publication number
JPS63108628U
JPS63108628U JP20169286U JP20169286U JPS63108628U JP S63108628 U JPS63108628 U JP S63108628U JP 20169286 U JP20169286 U JP 20169286U JP 20169286 U JP20169286 U JP 20169286U JP S63108628 U JPS63108628 U JP S63108628U
Authority
JP
Japan
Prior art keywords
heat treatment
reaction tube
semiconductor heat
wall
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20169286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20169286U priority Critical patent/JPS63108628U/ja
Publication of JPS63108628U publication Critical patent/JPS63108628U/ja
Pending legal-status Critical Current

Links

JP20169286U 1986-12-27 1986-12-27 Pending JPS63108628U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20169286U JPS63108628U (enrdf_load_stackoverflow) 1986-12-27 1986-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20169286U JPS63108628U (enrdf_load_stackoverflow) 1986-12-27 1986-12-27

Publications (1)

Publication Number Publication Date
JPS63108628U true JPS63108628U (enrdf_load_stackoverflow) 1988-07-13

Family

ID=31165381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20169286U Pending JPS63108628U (enrdf_load_stackoverflow) 1986-12-27 1986-12-27

Country Status (1)

Country Link
JP (1) JPS63108628U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5613720A (en) * 1979-07-16 1981-02-10 Fujitsu Ltd Heat treating device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5613720A (en) * 1979-07-16 1981-02-10 Fujitsu Ltd Heat treating device

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