JPS63108235A - 振動・音響計測一体型センサ− - Google Patents
振動・音響計測一体型センサ−Info
- Publication number
- JPS63108235A JPS63108235A JP25283286A JP25283286A JPS63108235A JP S63108235 A JPS63108235 A JP S63108235A JP 25283286 A JP25283286 A JP 25283286A JP 25283286 A JP25283286 A JP 25283286A JP S63108235 A JPS63108235 A JP S63108235A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- vibration
- microphone
- sound
- sound pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 title claims description 11
- 230000001133 acceleration Effects 0.000 claims abstract description 20
- 238000005192 partition Methods 0.000 claims abstract description 19
- 238000004891 communication Methods 0.000 claims abstract description 11
- 238000009530 blood pressure measurement Methods 0.000 claims abstract description 3
- 239000012528 membrane Substances 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 6
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 239000000470 constituent Substances 0.000 claims description 3
- 239000003566 sealing material Substances 0.000 claims description 3
- 230000005520 electrodynamics Effects 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 2
- 230000005856 abnormality Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 210000005069 ears Anatomy 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000033764 rhythmic process Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25283286A JPS63108235A (ja) | 1986-10-25 | 1986-10-25 | 振動・音響計測一体型センサ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25283286A JPS63108235A (ja) | 1986-10-25 | 1986-10-25 | 振動・音響計測一体型センサ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63108235A true JPS63108235A (ja) | 1988-05-13 |
| JPH0340331B2 JPH0340331B2 (enrdf_load_stackoverflow) | 1991-06-18 |
Family
ID=17242820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25283286A Granted JPS63108235A (ja) | 1986-10-25 | 1986-10-25 | 振動・音響計測一体型センサ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63108235A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012127759A (ja) * | 2010-12-14 | 2012-07-05 | Murata Mfg Co Ltd | 衝撃及び音響センサ |
| JP2017198525A (ja) * | 2016-04-27 | 2017-11-02 | 株式会社日本製鋼所 | 非接触振動測定による故障診断装置及び方法 |
| CN112088539A (zh) * | 2018-03-21 | 2020-12-15 | 美商楼氏电子有限公司 | 用于mems设备的电介质梳 |
-
1986
- 1986-10-25 JP JP25283286A patent/JPS63108235A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012127759A (ja) * | 2010-12-14 | 2012-07-05 | Murata Mfg Co Ltd | 衝撃及び音響センサ |
| JP2017198525A (ja) * | 2016-04-27 | 2017-11-02 | 株式会社日本製鋼所 | 非接触振動測定による故障診断装置及び方法 |
| CN112088539A (zh) * | 2018-03-21 | 2020-12-15 | 美商楼氏电子有限公司 | 用于mems设备的电介质梳 |
| US11825266B2 (en) | 2018-03-21 | 2023-11-21 | Knowles Electronics, Llc | Dielectric comb for MEMS device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0340331B2 (enrdf_load_stackoverflow) | 1991-06-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |