JPH0340331B2 - - Google Patents

Info

Publication number
JPH0340331B2
JPH0340331B2 JP25283286A JP25283286A JPH0340331B2 JP H0340331 B2 JPH0340331 B2 JP H0340331B2 JP 25283286 A JP25283286 A JP 25283286A JP 25283286 A JP25283286 A JP 25283286A JP H0340331 B2 JPH0340331 B2 JP H0340331B2
Authority
JP
Japan
Prior art keywords
vibration
microphone
sound
chamber
acoustic measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP25283286A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63108235A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP25283286A priority Critical patent/JPS63108235A/ja
Publication of JPS63108235A publication Critical patent/JPS63108235A/ja
Publication of JPH0340331B2 publication Critical patent/JPH0340331B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP25283286A 1986-10-25 1986-10-25 振動・音響計測一体型センサ− Granted JPS63108235A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25283286A JPS63108235A (ja) 1986-10-25 1986-10-25 振動・音響計測一体型センサ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25283286A JPS63108235A (ja) 1986-10-25 1986-10-25 振動・音響計測一体型センサ−

Publications (2)

Publication Number Publication Date
JPS63108235A JPS63108235A (ja) 1988-05-13
JPH0340331B2 true JPH0340331B2 (enrdf_load_stackoverflow) 1991-06-18

Family

ID=17242820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25283286A Granted JPS63108235A (ja) 1986-10-25 1986-10-25 振動・音響計測一体型センサ−

Country Status (1)

Country Link
JP (1) JPS63108235A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5609613B2 (ja) * 2010-12-14 2014-10-22 株式会社村田製作所 衝撃及び音響センサ
JP6396943B2 (ja) * 2016-04-27 2018-09-26 株式会社日本製鋼所 非接触振動測定による故障診断装置及び方法
WO2019183283A2 (en) * 2018-03-21 2019-09-26 Knowles Electronics, Llc Dielectric comb for mems device

Also Published As

Publication number Publication date
JPS63108235A (ja) 1988-05-13

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