JPS63108156U - - Google Patents
Info
- Publication number
- JPS63108156U JPS63108156U JP33587U JP33587U JPS63108156U JP S63108156 U JPS63108156 U JP S63108156U JP 33587 U JP33587 U JP 33587U JP 33587 U JP33587 U JP 33587U JP S63108156 U JPS63108156 U JP S63108156U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- secondary electrons
- ions
- secondary ions
- irradiating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000002500 ions Chemical class 0.000 claims 6
- 238000001514 detection method Methods 0.000 claims 1
- 230000005284 excitation Effects 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987000335U JPH076609Y2 (ja) | 1987-01-06 | 1987-01-06 | 集束イオンビーム加工装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987000335U JPH076609Y2 (ja) | 1987-01-06 | 1987-01-06 | 集束イオンビーム加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63108156U true JPS63108156U (tr) | 1988-07-12 |
JPH076609Y2 JPH076609Y2 (ja) | 1995-02-15 |
Family
ID=30777213
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987000335U Expired - Lifetime JPH076609Y2 (ja) | 1987-01-06 | 1987-01-06 | 集束イオンビーム加工装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH076609Y2 (tr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009536776A (ja) * | 2005-05-11 | 2009-10-15 | イーエル‐ムル テクノロジーズ リミテッド | 二次イオン、ならびに、直接およびまたは間接二次電子のための粒子検出器 |
JP2017224596A (ja) * | 2016-05-03 | 2017-12-21 | レインツリー サイエンティフィック インストゥルメンツ (シャンハイ) コーポレーションRaintree Scientific Instruments (Shanghai) Corporation | 帯電粒子検出装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4895294A (tr) * | 1972-03-17 | 1973-12-06 |
-
1987
- 1987-01-06 JP JP1987000335U patent/JPH076609Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4895294A (tr) * | 1972-03-17 | 1973-12-06 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009536776A (ja) * | 2005-05-11 | 2009-10-15 | イーエル‐ムル テクノロジーズ リミテッド | 二次イオン、ならびに、直接およびまたは間接二次電子のための粒子検出器 |
JP2017224596A (ja) * | 2016-05-03 | 2017-12-21 | レインツリー サイエンティフィック インストゥルメンツ (シャンハイ) コーポレーションRaintree Scientific Instruments (Shanghai) Corporation | 帯電粒子検出装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH076609Y2 (ja) | 1995-02-15 |
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