JPS63106767U - - Google Patents
Info
- Publication number
- JPS63106767U JPS63106767U JP1986198778U JP19877886U JPS63106767U JP S63106767 U JPS63106767 U JP S63106767U JP 1986198778 U JP1986198778 U JP 1986198778U JP 19877886 U JP19877886 U JP 19877886U JP S63106767 U JPS63106767 U JP S63106767U
- Authority
- JP
- Japan
- Prior art keywords
- partition wall
- energy source
- double structure
- growth apparatus
- optical energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986198778U JPS63106767U (enExample) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986198778U JPS63106767U (enExample) | 1986-12-26 | 1986-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106767U true JPS63106767U (enExample) | 1988-07-09 |
Family
ID=31159781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986198778U Pending JPS63106767U (enExample) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106767U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04254489A (ja) * | 1991-02-01 | 1992-09-09 | Nippon Seisan Gijutsu Kenkyusho:Kk | 減圧cvd装置 |
| JP2003500865A (ja) * | 1999-05-27 | 2003-01-07 | ステアーグ シーヴイディー システムズ リミテッド | 冷却されるウィンドウ |
-
1986
- 1986-12-26 JP JP1986198778U patent/JPS63106767U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04254489A (ja) * | 1991-02-01 | 1992-09-09 | Nippon Seisan Gijutsu Kenkyusho:Kk | 減圧cvd装置 |
| JP2003500865A (ja) * | 1999-05-27 | 2003-01-07 | ステアーグ シーヴイディー システムズ リミテッド | 冷却されるウィンドウ |