JPS62168639U - - Google Patents
Info
- Publication number
- JPS62168639U JPS62168639U JP1986058213U JP5821386U JPS62168639U JP S62168639 U JPS62168639 U JP S62168639U JP 1986058213 U JP1986058213 U JP 1986058213U JP 5821386 U JP5821386 U JP 5821386U JP S62168639 U JPS62168639 U JP S62168639U
- Authority
- JP
- Japan
- Prior art keywords
- impurity
- generation chamber
- communication port
- partition wall
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986058213U JPS62168639U (enExample) | 1986-04-16 | 1986-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986058213U JPS62168639U (enExample) | 1986-04-16 | 1986-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62168639U true JPS62168639U (enExample) | 1987-10-26 |
Family
ID=30888593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986058213U Pending JPS62168639U (enExample) | 1986-04-16 | 1986-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62168639U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5518995U (enExample) * | 1978-07-26 | 1980-02-06 | ||
| JPS56169324A (en) * | 1980-05-30 | 1981-12-26 | Nec Home Electronics Ltd | Diffusion of impurity |
-
1986
- 1986-04-16 JP JP1986058213U patent/JPS62168639U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5518995U (enExample) * | 1978-07-26 | 1980-02-06 | ||
| JPS56169324A (en) * | 1980-05-30 | 1981-12-26 | Nec Home Electronics Ltd | Diffusion of impurity |