JPS63162526U - - Google Patents

Info

Publication number

JPS63162526U

JPS63162526U JP5475787U JP5475787U JPS63162526U JP S63162526 U JPS63162526 U JP S63162526U JP 5475787 U JP5475787 U JP 5475787U JP 5475787 U JP5475787 U JP 5475787U JP S63162526 U JPS63162526 U JP S63162526U

Authority

JP

Japan

Prior art keywords

ultrapure water

water tank

nitrogen gas

gas feed

gas

Prior art date

1987-04-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 229910021642 ultra pure water Inorganic materials 0.000 claims description 6
• 239000012498 ultrapure water Substances 0.000 claims description 6
• 238000004140 cleaning Methods 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 3
• 235000012431 wafers Nutrition 0.000 claims description 3
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
• 229910001873 dinitrogen Inorganic materials 0.000 claims 2
• 239000007789 gas Substances 0.000 claims 2
• 230000005587 bubbling Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 229910052719 titanium Inorganic materials 0.000 description 1
• 239000010936 titanium Substances 0.000 description 1