JPS63114023U - - Google Patents
Info
- Publication number
- JPS63114023U JPS63114023U JP1987005002U JP500287U JPS63114023U JP S63114023 U JPS63114023 U JP S63114023U JP 1987005002 U JP1987005002 U JP 1987005002U JP 500287 U JP500287 U JP 500287U JP S63114023 U JPS63114023 U JP S63114023U
- Authority
- JP
- Japan
- Prior art keywords
- temperature part
- low
- means disposed
- reactor
- liquid phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987005002U JPS63114023U (enExample) | 1987-01-16 | 1987-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987005002U JPS63114023U (enExample) | 1987-01-16 | 1987-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63114023U true JPS63114023U (enExample) | 1988-07-22 |
Family
ID=30786180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987005002U Pending JPS63114023U (enExample) | 1987-01-16 | 1987-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63114023U (enExample) |
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1987
- 1987-01-16 JP JP1987005002U patent/JPS63114023U/ja active Pending