JPS63105337U - - Google Patents

Info

Publication number
JPS63105337U
JPS63105337U JP20281386U JP20281386U JPS63105337U JP S63105337 U JPS63105337 U JP S63105337U JP 20281386 U JP20281386 U JP 20281386U JP 20281386 U JP20281386 U JP 20281386U JP S63105337 U JPS63105337 U JP S63105337U
Authority
JP
Japan
Prior art keywords
wafer
width
support
groove
support jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20281386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533014Y2 (US06633600-20031014-M00021.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986202813U priority Critical patent/JPH0533014Y2/ja
Publication of JPS63105337U publication Critical patent/JPS63105337U/ja
Application granted granted Critical
Publication of JPH0533014Y2 publication Critical patent/JPH0533014Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
JP1986202813U 1986-12-25 1986-12-25 Expired - Lifetime JPH0533014Y2 (US06633600-20031014-M00021.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986202813U JPH0533014Y2 (US06633600-20031014-M00021.png) 1986-12-25 1986-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986202813U JPH0533014Y2 (US06633600-20031014-M00021.png) 1986-12-25 1986-12-25

Publications (2)

Publication Number Publication Date
JPS63105337U true JPS63105337U (US06633600-20031014-M00021.png) 1988-07-08
JPH0533014Y2 JPH0533014Y2 (US06633600-20031014-M00021.png) 1993-08-23

Family

ID=31167548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986202813U Expired - Lifetime JPH0533014Y2 (US06633600-20031014-M00021.png) 1986-12-25 1986-12-25

Country Status (1)

Country Link
JP (1) JPH0533014Y2 (US06633600-20031014-M00021.png)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970334U (ja) * 1982-11-01 1984-05-12 株式会社テクニスコ 拡散治具
JPS59111040U (ja) * 1983-01-17 1984-07-26 日本電気ホームエレクトロニクス株式会社 半導体製造用治具
JPS59149631U (ja) * 1983-03-24 1984-10-06 富士電機株式会社 シリコンウエ−ハの保持具
JPS61251144A (ja) * 1985-04-30 1986-11-08 Toshiba Corp ウエハ載置用ボ−ト

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970334U (ja) * 1982-11-01 1984-05-12 株式会社テクニスコ 拡散治具
JPS59111040U (ja) * 1983-01-17 1984-07-26 日本電気ホームエレクトロニクス株式会社 半導体製造用治具
JPS59149631U (ja) * 1983-03-24 1984-10-06 富士電機株式会社 シリコンウエ−ハの保持具
JPS61251144A (ja) * 1985-04-30 1986-11-08 Toshiba Corp ウエハ載置用ボ−ト

Also Published As

Publication number Publication date
JPH0533014Y2 (US06633600-20031014-M00021.png) 1993-08-23

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