JPS63102236U - - Google Patents

Info

Publication number
JPS63102236U
JPS63102236U JP19816186U JP19816186U JPS63102236U JP S63102236 U JPS63102236 U JP S63102236U JP 19816186 U JP19816186 U JP 19816186U JP 19816186 U JP19816186 U JP 19816186U JP S63102236 U JPS63102236 U JP S63102236U
Authority
JP
Japan
Prior art keywords
plate
shaped semiconductor
accommodating part
view
supporting member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19816186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19816186U priority Critical patent/JPS63102236U/ja
Publication of JPS63102236U publication Critical patent/JPS63102236U/ja
Pending legal-status Critical Current

Links

JP19816186U 1986-12-23 1986-12-23 Pending JPS63102236U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19816186U JPS63102236U (US06623731-20030923-C00012.png) 1986-12-23 1986-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19816186U JPS63102236U (US06623731-20030923-C00012.png) 1986-12-23 1986-12-23

Publications (1)

Publication Number Publication Date
JPS63102236U true JPS63102236U (US06623731-20030923-C00012.png) 1988-07-02

Family

ID=31158598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19816186U Pending JPS63102236U (US06623731-20030923-C00012.png) 1986-12-23 1986-12-23

Country Status (1)

Country Link
JP (1) JPS63102236U (US06623731-20030923-C00012.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02145240U (US06623731-20030923-C00012.png) * 1989-05-15 1990-12-10
JPH0348439A (ja) * 1989-07-17 1991-03-01 Tokyo Electron Sagami Ltd 熱処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860553A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860553A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02145240U (US06623731-20030923-C00012.png) * 1989-05-15 1990-12-10
JPH0348439A (ja) * 1989-07-17 1991-03-01 Tokyo Electron Sagami Ltd 熱処理装置

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