JPS63101171U - - Google Patents

Info

Publication number
JPS63101171U
JPS63101171U JP19677786U JP19677786U JPS63101171U JP S63101171 U JPS63101171 U JP S63101171U JP 19677786 U JP19677786 U JP 19677786U JP 19677786 U JP19677786 U JP 19677786U JP S63101171 U JPS63101171 U JP S63101171U
Authority
JP
Japan
Prior art keywords
reflow oven
tunnel
shield
movable frame
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19677786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0324283Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986196777U priority Critical patent/JPH0324283Y2/ja
Publication of JPS63101171U publication Critical patent/JPS63101171U/ja
Application granted granted Critical
Publication of JPH0324283Y2 publication Critical patent/JPH0324283Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP1986196777U 1986-12-23 1986-12-23 Expired JPH0324283Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986196777U JPH0324283Y2 (enExample) 1986-12-23 1986-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986196777U JPH0324283Y2 (enExample) 1986-12-23 1986-12-23

Publications (2)

Publication Number Publication Date
JPS63101171U true JPS63101171U (enExample) 1988-07-01
JPH0324283Y2 JPH0324283Y2 (enExample) 1991-05-27

Family

ID=31155891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986196777U Expired JPH0324283Y2 (enExample) 1986-12-23 1986-12-23

Country Status (1)

Country Link
JP (1) JPH0324283Y2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000022898A1 (en) * 1998-10-13 2000-04-20 Matsushita Electric Industrial Co., Ltd. Heating device and heating method
JP2020141000A (ja) * 2019-02-27 2020-09-03 株式会社Ｆｕｊｉ 基板処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644712A (en) * 1979-09-14 1981-04-24 Kawasaki Steel Corp Opening and closing device of heating furnace
JPS5848557U (ja) * 1981-09-30 1983-04-01 株式会社日立製作所 機関車用屋根構造

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644712A (en) * 1979-09-14 1981-04-24 Kawasaki Steel Corp Opening and closing device of heating furnace
JPS5848557U (ja) * 1981-09-30 1983-04-01 株式会社日立製作所 機関車用屋根構造

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000022898A1 (en) * 1998-10-13 2000-04-20 Matsushita Electric Industrial Co., Ltd. Heating device and heating method
CN1317925C (zh) * 1998-10-13 2007-05-23 松下电器产业株式会社 加热装置和加热方法
JP2020141000A (ja) * 2019-02-27 2020-09-03 株式会社Ｆｕｊｉ 基板処理装置

Also Published As

Publication number Publication date
JPH0324283Y2 (enExample) 1991-05-27

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