JPS6299865U - - Google Patents
Info
- Publication number
- JPS6299865U JPS6299865U JP19224085U JP19224085U JPS6299865U JP S6299865 U JPS6299865 U JP S6299865U JP 19224085 U JP19224085 U JP 19224085U JP 19224085 U JP19224085 U JP 19224085U JP S6299865 U JPS6299865 U JP S6299865U
- Authority
- JP
- Japan
- Prior art keywords
- temperature sensor
- time
- heat generating
- sensor chip
- measuring means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19224085U JPS6299865U (US20100056889A1-20100304-C00004.png) | 1985-12-16 | 1985-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19224085U JPS6299865U (US20100056889A1-20100304-C00004.png) | 1985-12-16 | 1985-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6299865U true JPS6299865U (US20100056889A1-20100304-C00004.png) | 1987-06-25 |
Family
ID=31147130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19224085U Pending JPS6299865U (US20100056889A1-20100304-C00004.png) | 1985-12-16 | 1985-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6299865U (US20100056889A1-20100304-C00004.png) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0933555A (ja) * | 1995-07-25 | 1997-02-07 | Yamatake Honeywell Co Ltd | 流体計測方法および流体計測装置 |
| JP2003028692A (ja) * | 2001-07-18 | 2003-01-29 | Nikkiso Co Ltd | 流量測定方法および装置 |
| JP2004184177A (ja) * | 2002-12-02 | 2004-07-02 | Nikkiso Co Ltd | 流量計 |
| JP2007248118A (ja) * | 2006-03-14 | 2007-09-27 | Surpass Kogyo Kk | 熱信号を用いた流速検出方法及び流速検出装置 |
| JP2013516622A (ja) * | 2010-01-06 | 2013-05-13 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 流体の流速測定システム |
-
1985
- 1985-12-16 JP JP19224085U patent/JPS6299865U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0933555A (ja) * | 1995-07-25 | 1997-02-07 | Yamatake Honeywell Co Ltd | 流体計測方法および流体計測装置 |
| JP2003028692A (ja) * | 2001-07-18 | 2003-01-29 | Nikkiso Co Ltd | 流量測定方法および装置 |
| JP2004184177A (ja) * | 2002-12-02 | 2004-07-02 | Nikkiso Co Ltd | 流量計 |
| JP2007248118A (ja) * | 2006-03-14 | 2007-09-27 | Surpass Kogyo Kk | 熱信号を用いた流速検出方法及び流速検出装置 |
| WO2007119313A1 (ja) * | 2006-03-14 | 2007-10-25 | Surpass Industry Co., Ltd. | 熱信号を用いた流速検出方法及び流速検出装置 |
| JP2013516622A (ja) * | 2010-01-06 | 2013-05-13 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 流体の流速測定システム |
