JPS6299865U

JPS6299865U -

Info

Publication number: JPS6299865U
Application number: JP19224085U
Authority: JP
Priority date: 1985-12-16
Filing date: 1985-12-16
Publication date: 1987-06-25

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例を示すブロツク図、
第２図および第３図はそれぞれ第１図の実施例に
おけるセンサチツプを示す斜視図、第４図ないし
第６図はそれぞれ第１図の実施例の動作を説明す
るための波形図、第７図は第１図の実施例に利用
可能な発熱エレメントの発熱手段を示す回路図、
第８図は本考案の他の実施例を示すブロツク図、
第９図は本考案のさらに他の実施例を示すブロツ
ク図、第１０図および第１１図はそれぞれ第９図
の実施例におけるセンサチツプを示す斜視図、第
１２図および第１３図はそれぞれ第９図の実施例
の動作を説明するための波形図である。１……発熱エレメント、２，２ａ，２ｂ……温
度センサエレメント、４……架橋部、５……シリ
コン基台、６……窒化シリコン膜、１０……セン
サチツプ、２３……時間計測回路、３０……流速
演算器。 FIG. 1 is a block diagram showing an embodiment of the present invention.
2 and 3 are respectively perspective views showing the sensor chip in the embodiment of FIG. 1, FIGS. 4 to 6 are waveform diagrams for explaining the operation of the embodiment of FIG. 1, respectively, and FIG. is a circuit diagram showing a heating means of a heating element that can be used in the embodiment of FIG. 1;
FIG. 8 is a block diagram showing another embodiment of the present invention;
FIG. 9 is a block diagram showing still another embodiment of the present invention, FIGS. 10 and 11 are perspective views respectively showing the sensor chip in the embodiment of FIG. 9, and FIGS. FIG. 3 is a waveform chart for explaining the operation of the embodiment shown in the figure. DESCRIPTION OF SYMBOLS 1...Heating element, 2, 2a, 2b...Temperature sensor element, 4...Bridge portion, 5...Silicon base, 6...Silicon nitride film, 10...Sensor chip, 23...Time measurement circuit, 30 ...Flow velocity calculator.

Claims

[Scope of utility model registration request]

A heating element and 1 are placed on the thin film plate.
or a sensor chip in which two or more temperature sensor elements are formed adjacent to each other, a means for applying a voltage to the heat generating element, and a time difference between the temperature change times of the heat generating element and the temperature sensor element or a temperature change time between the temperature sensor elements; 1. A current meter comprising: a time measuring means for detecting a time difference; and a flow velocity calculating means for calculating the velocity of the fluid moving on the sensor chip from the output of the time measuring means.