JPS6112115U - Temperature control device for IC test equipment - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

Fig. 1 is a block diagram showing an example of the temperature control device of this invention, Fig. 2 is a flow chart showing an example of its operation processing, and Fig. 3 shows the channel buffer sofa, block lead buffer, average buffer, and table buffer. Figure 4 is a diagram showing a deviation table, Figure 5 is a diagram showing a duty buffer, control buffer, heater enable buffer, and heater control buffer, and Figure 6 is a side view showing the general configuration of an IC test device. 7 is a perspective view of FIG. 6, and FIG. 8 is a diagram showing a conventional temperature control device.

Claims (1)

[Scope of utility model registration request] An IC test device in which an IC element passes through a plurality of paths, is preheated in a preheat section in each path, is further heated in a measurement section, and is measured,
A temperature sensor that is provided in each preheat section and each measurement section for each of the passages and detects the temperature at that location;
An acquisition means that periodically and sequentially acquires the detected temperatures of these temperature sensors, a deviation calculation means that calculates the deviation between the acquired temperature and the target temperature, and a control unit that corresponds to the deviation and control duty ratio based on the calculated deviation. means for reading out a deviation table that stores the relationship with the data; a duty buffer that stores the read data for each corresponding temperature sensor; and turning on electricity to the temperature sensor and the heater corresponding to the data in the duty buffer. A temperature control device for an IC testing device, comprising: a control means for performing off control;