JPS6297167U - - Google Patents

Info

Publication number
JPS6297167U
JPS6297167U JP18831285U JP18831285U JPS6297167U JP S6297167 U JPS6297167 U JP S6297167U JP 18831285 U JP18831285 U JP 18831285U JP 18831285 U JP18831285 U JP 18831285U JP S6297167 U JPS6297167 U JP S6297167U
Authority
JP
Japan
Prior art keywords
tube
vapor deposition
deposition device
vacuum vessel
lead wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18831285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18831285U priority Critical patent/JPS6297167U/ja
Publication of JPS6297167U publication Critical patent/JPS6297167U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18831285U 1985-12-05 1985-12-05 Pending JPS6297167U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18831285U JPS6297167U (enrdf_load_stackoverflow) 1985-12-05 1985-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18831285U JPS6297167U (enrdf_load_stackoverflow) 1985-12-05 1985-12-05

Publications (1)

Publication Number Publication Date
JPS6297167U true JPS6297167U (enrdf_load_stackoverflow) 1987-06-20

Family

ID=31139555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18831285U Pending JPS6297167U (enrdf_load_stackoverflow) 1985-12-05 1985-12-05

Country Status (1)

Country Link
JP (1) JPS6297167U (enrdf_load_stackoverflow)

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