JPH0472547U - - Google Patents

Info

Publication number
JPH0472547U
JPH0472547U JP11552590U JP11552590U JPH0472547U JP H0472547 U JPH0472547 U JP H0472547U JP 11552590 U JP11552590 U JP 11552590U JP 11552590 U JP11552590 U JP 11552590U JP H0472547 U JPH0472547 U JP H0472547U
Authority
JP
Japan
Prior art keywords
filament
plasma generation
vessel
lead part
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11552590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11552590U priority Critical patent/JPH0472547U/ja
Publication of JPH0472547U publication Critical patent/JPH0472547U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP11552590U 1990-11-02 1990-11-02 Pending JPH0472547U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11552590U JPH0472547U (enrdf_load_stackoverflow) 1990-11-02 1990-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11552590U JPH0472547U (enrdf_load_stackoverflow) 1990-11-02 1990-11-02

Publications (1)

Publication Number Publication Date
JPH0472547U true JPH0472547U (enrdf_load_stackoverflow) 1992-06-25

Family

ID=31863298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11552590U Pending JPH0472547U (enrdf_load_stackoverflow) 1990-11-02 1990-11-02

Country Status (1)

Country Link
JP (1) JPH0472547U (enrdf_load_stackoverflow)

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