JPS641455U - - Google Patents

Info

Publication number
JPS641455U
JPS641455U JP9568087U JP9568087U JPS641455U JP S641455 U JPS641455 U JP S641455U JP 9568087 U JP9568087 U JP 9568087U JP 9568087 U JP9568087 U JP 9568087U JP S641455 U JPS641455 U JP S641455U
Authority
JP
Japan
Prior art keywords
ion source
plasma generation
generation vessel
outside
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9568087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9568087U priority Critical patent/JPS641455U/ja
Publication of JPS641455U publication Critical patent/JPS641455U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP9568087U 1987-06-22 1987-06-22 Pending JPS641455U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9568087U JPS641455U (enrdf_load_stackoverflow) 1987-06-22 1987-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9568087U JPS641455U (enrdf_load_stackoverflow) 1987-06-22 1987-06-22

Publications (1)

Publication Number Publication Date
JPS641455U true JPS641455U (enrdf_load_stackoverflow) 1989-01-06

Family

ID=30960501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9568087U Pending JPS641455U (enrdf_load_stackoverflow) 1987-06-22 1987-06-22

Country Status (1)

Country Link
JP (1) JPS641455U (enrdf_load_stackoverflow)

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