JPS6296845U - - Google Patents
Info
- Publication number
- JPS6296845U JPS6296845U JP18823385U JP18823385U JPS6296845U JP S6296845 U JPS6296845 U JP S6296845U JP 18823385 U JP18823385 U JP 18823385U JP 18823385 U JP18823385 U JP 18823385U JP S6296845 U JPS6296845 U JP S6296845U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- frequency
- cleaned
- wave
- emitting source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は本考案に係る一実施例の構成を示す断
面図、第２図は従来例の構成を示す断面図である
。
１…洗浄槽、２…洗浄液、３…高周波数振動子
、４…キヤリア、５…ウエハース、６…キヤリア
ベース、７…アーム、８…固定壁、９…シリンダ
、１０…移動手段、１１…フランジ部、１２…シ
リンダ。
FIG. 1 is a sectional view showing the structure of an embodiment of the present invention, and FIG. 2 is a sectional view showing the structure of a conventional example. DESCRIPTION OF SYMBOLS 1...Cleaning tank, 2...Cleaning liquid, 3...High frequency vibrator, 4...Carrier, 5...Wafer, 6...Carrier base, 7...Arm, 8...Fixed wall, 9...Cylinder, 10...Moving means, 11...Flange Part, 12...Cylinder.
Claims (1)
内に配置され、被洗浄物を収容保持する上面開口
のキヤリアと；該キヤリアの上方位置からキヤリ
アに収容されている被洗浄物に洗浄波を照射する
洗浄波発射源と；該洗浄波発射源と前記キヤリア
とを互いにほぼ水平方向に相対移動させる移動手
段と；を有することを特徴とする高周波数洗浄装
置。 (2) 洗浄波発射源は振動数の高い振動波を発射
する高周波数振動子からなることを特徴とする実
用新案登録請求の範囲第(1)項記載の高周波数洗
浄装置。[Claims for Utility Model Registration] (1) A cleaning tank into which cleaning liquid is placed; a carrier with an opening at the top that is disposed within the cleaning tank and accommodates and holds objects to be cleaned; A high frequency cleaning device comprising: a cleaning wave emitting source that irradiates a cleaning wave onto an object to be cleaned; and moving means for moving the cleaning wave emitting source and the carrier relative to each other in a substantially horizontal direction. . (2) The high-frequency cleaning device according to claim (1), wherein the cleaning wave emission source is comprised of a high-frequency vibrator that emits high-frequency vibration waves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18823385U JPS6296845U (en) | 1985-12-06 | 1985-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18823385U JPS6296845U (en) | 1985-12-06 | 1985-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6296845U true JPS6296845U (en) | 1987-06-20 |
Family
ID=31139404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18823385U Pending JPS6296845U (en) | 1985-12-06 | 1985-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6296845U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008259998A (en) * | 2007-04-13 | 2008-10-30 | Shinka Jitsugyo Kk | Ultrasonic cleaning apparatus and method therefor |
| JP2019145672A (en) * | 2018-02-21 | 2019-08-29 | 三菱電機株式会社 | Cleaning device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59142885A (en) * | 1983-02-07 | 1984-08-16 | 株式会社日立製作所 | Ultrasonic treating method and apparatus |
-
1985
- 1985-12-06 JP JP18823385U patent/JPS6296845U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59142885A (en) * | 1983-02-07 | 1984-08-16 | 株式会社日立製作所 | Ultrasonic treating method and apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008259998A (en) * | 2007-04-13 | 2008-10-30 | Shinka Jitsugyo Kk | Ultrasonic cleaning apparatus and method therefor |
| JP2019145672A (en) * | 2018-02-21 | 2019-08-29 | 三菱電機株式会社 | Cleaning device |
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