JPS6296845U - - Google Patents
Info
- Publication number
- JPS6296845U JPS6296845U JP18823385U JP18823385U JPS6296845U JP S6296845 U JPS6296845 U JP S6296845U JP 18823385 U JP18823385 U JP 18823385U JP 18823385 U JP18823385 U JP 18823385U JP S6296845 U JPS6296845 U JP S6296845U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- frequency
- cleaned
- wave
- emitting source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第1図は本考案に係る一実施例の構成を示す断
面図、第2図は従来例の構成を示す断面図である
。
1…洗浄槽、2…洗浄液、3…高周波数振動子
、4…キヤリア、5…ウエハース、6…キヤリア
ベース、7…アーム、8…固定壁、9…シリンダ
、10…移動手段、11…フランジ部、12…シ
リンダ。
FIG. 1 is a sectional view showing the structure of an embodiment of the present invention, and FIG. 2 is a sectional view showing the structure of a conventional example. DESCRIPTION OF SYMBOLS 1...Cleaning tank, 2...Cleaning liquid, 3...High frequency vibrator, 4...Carrier, 5...Wafer, 6...Carrier base, 7...Arm, 8...Fixed wall, 9...Cylinder, 10...Moving means, 11...Flange Part, 12...Cylinder.
Claims (1)
内に配置され、被洗浄物を収容保持する上面開口
のキヤリアと;該キヤリアの上方位置からキヤリ
アに収容されている被洗浄物に洗浄波を照射する
洗浄波発射源と;該洗浄波発射源と前記キヤリア
とを互いにほぼ水平方向に相対移動させる移動手
段と;を有することを特徴とする高周波数洗浄装
置。 (2) 洗浄波発射源は振動数の高い振動波を発射
する高周波数振動子からなることを特徴とする実
用新案登録請求の範囲第(1)項記載の高周波数洗
浄装置。[Claims for Utility Model Registration] (1) A cleaning tank into which cleaning liquid is placed; a carrier with an opening at the top that is disposed within the cleaning tank and accommodates and holds objects to be cleaned; A high frequency cleaning device comprising: a cleaning wave emitting source that irradiates a cleaning wave onto an object to be cleaned; and moving means for moving the cleaning wave emitting source and the carrier relative to each other in a substantially horizontal direction. . (2) The high-frequency cleaning device according to claim (1), wherein the cleaning wave emission source is comprised of a high-frequency vibrator that emits high-frequency vibration waves.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18823385U JPS6296845U (en) | 1985-12-06 | 1985-12-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18823385U JPS6296845U (en) | 1985-12-06 | 1985-12-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6296845U true JPS6296845U (en) | 1987-06-20 |
Family
ID=31139404
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18823385U Pending JPS6296845U (en) | 1985-12-06 | 1985-12-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6296845U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008259998A (en) * | 2007-04-13 | 2008-10-30 | Shinka Jitsugyo Kk | Ultrasonic cleaning apparatus and method therefor |
JP2019145672A (en) * | 2018-02-21 | 2019-08-29 | 三菱電機株式会社 | Cleaning device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59142885A (en) * | 1983-02-07 | 1984-08-16 | 株式会社日立製作所 | Ultrasonic treating method and apparatus |
-
1985
- 1985-12-06 JP JP18823385U patent/JPS6296845U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59142885A (en) * | 1983-02-07 | 1984-08-16 | 株式会社日立製作所 | Ultrasonic treating method and apparatus |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008259998A (en) * | 2007-04-13 | 2008-10-30 | Shinka Jitsugyo Kk | Ultrasonic cleaning apparatus and method therefor |
JP2019145672A (en) * | 2018-02-21 | 2019-08-29 | 三菱電機株式会社 | Cleaning device |
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