JPS63201692U - - Google Patents
Info
- Publication number
- JPS63201692U JPS63201692U JP9493287U JP9493287U JPS63201692U JP S63201692 U JPS63201692 U JP S63201692U JP 9493287 U JP9493287 U JP 9493287U JP 9493287 U JP9493287 U JP 9493287U JP S63201692 U JPS63201692 U JP S63201692U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning device
- cleaning liquid
- cleaned
- ultrasonic waves
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 4
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は本考案の実施例に係る超音波洗浄装置
の構造図、第２図は前記超音波洗浄装置の洗浄液
の噴流放射を行う部分の概略構成図である。
１……洗浄槽、２……スクリーン版（被洗浄物
）、３……超音波振動子、４……洗浄液、５……
噴流パイプ、６……供給パイプ、７……吸入口、
８……ポンプ。
FIG. 1 is a structural diagram of an ultrasonic cleaning device according to an embodiment of the present invention, and FIG. 2 is a schematic diagram of a portion of the ultrasonic cleaning device that emits a jet of cleaning liquid. 1...Cleaning tank, 2...Screen plate (object to be cleaned), 3...Ultrasonic vibrator, 4...Cleaning liquid, 5...
Jet pipe, 6... supply pipe, 7... suction port,
8...Pump.
Claims (1)
射する洗浄装置において、 超音波が照射されている前記被洗浄物の平板状
の面部近傍に前記洗浄液の噴流を放射する手段を
具備することを特徴とする超音波洗浄装置。[Claims for Utility Model Registration] In a cleaning device that irradiates ultrasonic waves to a flat object to be cleaned via a cleaning liquid, a jet of the cleaning liquid near the flat surface of the object to be cleaned that is irradiated with ultrasonic waves. An ultrasonic cleaning device characterized by comprising means for radiating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9493287U JPS63201692U (en) | 1987-06-18 | 1987-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9493287U JPS63201692U (en) | 1987-06-18 | 1987-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63201692U true JPS63201692U (en) | 1988-12-26 |
Family
ID=30958896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9493287U Pending JPS63201692U (en) | 1987-06-18 | 1987-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63201692U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111151500A (en) * | 2018-11-08 | 2020-05-15 | 世源科技工程有限公司 | Method and device for cleaning mask plate with low cleaning agent field capacity |
-
1987
- 1987-06-18 JP JP9493287U patent/JPS63201692U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111151500A (en) * | 2018-11-08 | 2020-05-15 | 世源科技工程有限公司 | Method and device for cleaning mask plate with low cleaning agent field capacity |
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