JPS629673Y2 - - Google Patents
Info
- Publication number
- JPS629673Y2 JPS629673Y2 JP3214779U JP3214779U JPS629673Y2 JP S629673 Y2 JPS629673 Y2 JP S629673Y2 JP 3214779 U JP3214779 U JP 3214779U JP 3214779 U JP3214779 U JP 3214779U JP S629673 Y2 JPS629673 Y2 JP S629673Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- cylindrical
- heating body
- spacers
- independent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 16
- 125000006850 spacer group Chemical group 0.000 claims description 13
- 239000012212 insulator Substances 0.000 claims description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000002470 thermal conductor Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 235000000396 iron Nutrition 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 229920006015 heat resistant resin Polymers 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3214779U JPS629673Y2 (pt) | 1979-03-12 | 1979-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3214779U JPS629673Y2 (pt) | 1979-03-12 | 1979-03-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55131091U JPS55131091U (pt) | 1980-09-17 |
| JPS629673Y2 true JPS629673Y2 (pt) | 1987-03-06 |
Family
ID=28885106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3214779U Expired JPS629673Y2 (pt) | 1979-03-12 | 1979-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS629673Y2 (pt) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4497913B2 (ja) * | 2003-12-17 | 2010-07-07 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | 単結晶半導体製造用ヒータ装置 |
-
1979
- 1979-03-12 JP JP3214779U patent/JPS629673Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55131091U (pt) | 1980-09-17 |
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