JPS6296558U - - Google Patents
Info
- Publication number
- JPS6296558U JPS6296558U JP17271086U JP17271086U JPS6296558U JP S6296558 U JPS6296558 U JP S6296558U JP 17271086 U JP17271086 U JP 17271086U JP 17271086 U JP17271086 U JP 17271086U JP S6296558 U JPS6296558 U JP S6296558U
- Authority
- JP
- Japan
- Prior art keywords
- diffusion layer
- moisture
- atmosphere
- humidity
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 230000035699 permeability Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986172710U JPH0313721Y2 (en, 2012) | 1986-11-12 | 1986-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986172710U JPH0313721Y2 (en, 2012) | 1986-11-12 | 1986-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6296558U true JPS6296558U (en, 2012) | 1987-06-19 |
| JPH0313721Y2 JPH0313721Y2 (en, 2012) | 1991-03-28 |
Family
ID=31109498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986172710U Expired JPH0313721Y2 (en, 2012) | 1986-11-12 | 1986-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0313721Y2 (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0210146A (ja) * | 1988-06-28 | 1990-01-12 | Nok Corp | 感湿素子およびその動作回路 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53132981A (en) * | 1977-04-25 | 1978-11-20 | Massachusetts Inst Technology | Charge flow transistor and machine using same |
-
1986
- 1986-11-12 JP JP1986172710U patent/JPH0313721Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53132981A (en) * | 1977-04-25 | 1978-11-20 | Massachusetts Inst Technology | Charge flow transistor and machine using same |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0210146A (ja) * | 1988-06-28 | 1990-01-12 | Nok Corp | 感湿素子およびその動作回路 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0313721Y2 (en, 2012) | 1991-03-28 |