JPS6296516U

JPS6296516U -

Info

Publication number: JPS6296516U
Application number: JP12510086U
Authority: JP
Priority date: 1986-08-15
Filing date: 1986-08-15
Publication date: 1987-06-19

Description

[Brief explanation of drawings]

第１図は本考案の無接点変位検出器の基本構成
を示した模式図でａは平面図、ｂは斜視図、第２
図は本考案の実施例を示す図でａは平面図、ｂは
斜視図、第３図は実験に使用したＭＲ素子を表わ
す平面図、第４図はＭＲ素子出力を実測した例を
示す図でａは具体的構成図、ｂは出力曲線、第５
図は磁界の方向の回転を検出しているのではない
構成についてＭＲ素子出力を実測した図で、ａは
具体的構成図、ｂは出力曲線を示す図である。図において、１，６１，９８はＭＲ素子、２，
６２，９９は永久磁石、３は駆動検出回路、５，
６３，１００は変位線、６，９１はＭＲ素子の基
板、８，９３，９４，９５，９６は電極端子、６
３Ａ，６３Ｂは変位線上の点、４，６４は面内成
分磁界、６６は永久磁石の対向面、６７は永久磁
石の対向面の一辺、７，６８，９２はＭＲ膜、９
７はＭＲ素子の基準方向を表わす。 Figure 1 is a schematic diagram showing the basic configuration of the non-contact displacement detector of the present invention, in which a is a plan view, b is a perspective view, and
The figures show an embodiment of the present invention, in which a is a plan view, b is a perspective view, Fig. 3 is a plan view showing the MR element used in the experiment, and Fig. 4 is a diagram showing an example of actually measured MR element output. where a is the specific configuration diagram, b is the output curve, and the fifth
The figure shows the actual measurement of the MR element output for a configuration in which rotation in the direction of the magnetic field is not detected, in which a is a diagram showing a specific configuration and b is a diagram showing an output curve. In the figure, 1, 61, 98 are MR elements, 2,
62, 99 are permanent magnets, 3 is a drive detection circuit, 5,
63, 100 are displacement lines, 6, 91 are MR element substrates, 8, 93, 94, 95, 96 are electrode terminals, 6
3A and 63B are points on the displacement line, 4 and 64 are in-plane component magnetic fields, 66 is the opposing surface of the permanent magnet, 67 is one side of the opposing surface of the permanent magnet, 7, 68, and 92 are the MR films, 9
7 represents the reference direction of the MR element.

Claims

[Claims for Utility Model Registration] 1. A device comprising a permanent magnet and a ferromagnetic magnetoresistive element that are linearly displaced relative to each other, and a drive detection circuit that outputs the relative displacement as an electrical signal. In the contact displacement detector, while maintaining the strength of the magnetic field acting on the ferromagnetic magnetoresistive thin film of the ferromagnetic magnetoresistive element by the permanent magnet to be greater than the intensity required for magnetization rotation of the ferromagnetic magnetoresistive thin film. , and the opposing surfaces of the permanent magnets are arranged so that the direction of the magnetic field rotates on an inner surface parallel to the opposing surface of the permanent magnet facing the ferromagnetic magnetoresistive thin film. A rectangle with sides parallel to the direction of relative displacement, with a total size of N
a pole (or S pole), and further, the film surface of the ferromagnetic magnetoresistive thin film, the surface facing the permanent magnet, and the direction of the relative displacement are all substantially parallel, and the center of the ferromagnetic magnetoresistive thin film is opposite to the opposing surface. A non-contact displacement detector, characterized in that the non-contact displacement detector is arranged so as to face a side near a side parallel to the relative displacement of the surface. 2. A utility model according to claim 1, in which the ferromagnetic magnetoresistive element is arranged so that the direction of the current flowing through the ferromagnetic magnetoresistive thin film and the parallel of the relative displacement are substantially perpendicular or parallel to each other. Non-contact displacement detector.