JPS6296519U - - Google Patents

Description

[Brief explanation of the drawing]

Figure 1 is a schematic diagram showing the basic configuration of the non-contact displacement detector of the present invention, in which a is a plan view, b is a perspective view, and
The figures show examples; a is a plan view, b is a perspective view,
Figure 3 is a plan view showing the MR element used in the experiment, Figure 4 is a diagram showing an example of actually measuring the output of the MR element, where a is a specific configuration diagram, b is an output curve, and Figure 5 is a diagram showing the direction of the magnetic field. 2 is a diagram showing actual measurement of the MR element output for a configuration in which rotation is not detected; a is a diagram showing a specific configuration, and b is a diagram showing an output curve. In the figure, 1, 11, 98 are MR elements, 2,
12, 99 are permanent magnets, 3 is a drive detection circuit, 5,
13, 100 are displacement lines, 6, 91 are MR element substrates, 8, 93, 94, 95, 96 are electrode terminals, 1
3A, 13B, 13C are points on the displacement line, 4, 14
is an in-plane component magnetic field, 15 and 16 are regions on the opposing surfaces of the permanent magnets, 17 is the boundary line of the regions on the opposing surfaces of the permanent magnets, 19 is one side of the opposing surfaces of the permanent magnets, 7 and 18
, 92 represents the MR film, and 97 represents the reference direction of the MR element.

Claims (1)

[Claims for Utility Model Registration] 1. A device comprising a permanent magnet and a ferromagnetic magnetoresistive element that are linearly displaced relative to each other, and a drive detection circuit that outputs the relative displacement as an electrical signal. In the contact displacement detector, while maintaining the strength of the magnetic field acting on the ferromagnetic magnetoresistive thin film of the ferromagnetic magnetoresistive element by the permanent magnet to be greater than the intensity required for magnetization rotation of the ferromagnetic magnetoresistive thin film. , and the facing surfaces of the permanent magnets are arranged relative to each other such that the direction of the magnetic field rotates in a plane parallel to the facing surface of the permanent magnets facing the ferromagnetic magnetoresistive thin film. A rectangular area with sides parallel to the direction of displacement, divided into two areas by an L-shaped boundary line, and the entire area of each area, or the portion excluding the area near the boundary line, has magnetic poles opposite to each other. . A non-contact displacement detector further characterized in that the film surface of the ferromagnetic magnetoresistive thin film, the opposing surface of the permanent magnet, and the direction of the relative displacement are all arranged substantially parallel to each other. 2. The device according to claim 1, in which the ferromagnetic magnetoresistive element is arranged so that the direction of current flowing through the ferromagnetic magnetoresistive thin film and the direction of relative displacement are approximately 45 degrees. Contact displacement detector.