JPS6296378A - High temperature sliding member - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a high-temperature sliding member used as a sealing material, a hair ring material, etc., and more specifically.

The present invention relates to a ceramic high-temperature sliding member whose surface has been modified without changing the original features of the ceramic, which has excellent heat resistance, and whose temperature-temperature sliding properties have been improved.

[Conventional technology and its problems]

BACKGROUND ART Conventionally, heat-resistant metal materials such as cobalt (Co), nickel (Ni) 71, etc., and alloys thereof have been used as sealing materials, bearing materials, and other sliding members in high-temperature atmospheres. However, from the viewpoint of heat resistance such as oxidation resistance and high temperature strength.

Currently, the operating temperature is limited to about 800°C.

Therefore, efforts are being made to utilize ceramic materials that have better physical, chemical, and mechanical properties than metals in high-temperature atmospheres. However, this ceramic material
This ceramic material has the disadvantage of low wear resistance and a marked increase in wear as the temperature rises, and this ceramic material has sufficient high-temperature properties as a structural material.
It is difficult to use it as a sliding member.

This is because when a material made of ceramics is used as a sliding member, the ceramic material is worn away and abrasion powder is generated during the sliding process in a high-temperature atmosphere, and the abrasive action of this abrasion powder and increase in surface roughness. , wear of the sliding member and the mating material is accelerated. If the mating material is made of ceramic material, this wear will be significant and the change in one dimension will be severe.

Difficult to put into practical use.

In order to solve this problem, various developments have been carried out in the past.
Several sliding members with improved wear resistance have been proposed. One of them is a silicon nitride material obtained by adding boron nitride (BN), which is a solid lubricant, to ceramic raw material f-1 and firing the surface layer using this raw material (Unexamined Japanese Patent Publication No. Publication No. 59-137375). However, although this ceramic material does show some improvement in wear resistance.

There has been a problem in that the high-temperature properties inherent in ceramic and wood materials, particularly the high-temperature strength, are reduced.

Therefore, the inventors of the present invention conducted intensive research to solve the problems of the prior art as described above, and as a result of various systematic experiments, they came up with the present invention.

[Purpose of the invention]

An object of the present invention is to provide a sliding member that has excellent wear resistance in a high-temperature atmosphere.

[Structure of the invention]

The high-temperature sliding member of the present invention has nickel (Ni) deposited on a base material made of nitride ceramic or wood by physical vapor deposition.

It is characterized by forming a metal film made of one type of manganese (Mn>) or an alloy thereof.

The configuration of the present invention will be explained in more detail below.

The base material in the present invention is a base material for a high-temperature sliding member, and is a nitride ceramic sintered body manufactured using nitride as the main raw material. Use ceramics.

This nitride ceramic has excellent heat resistance and excellent physical, chemical, and mechanical properties even in a high-temperature atmosphere.

・The metal film formed on the surface of the base material made of nitride ceramics is a thin metal film that provides wear resistance to the ceramic base material in high-temperature atmospheres, and contains nickel (Ni) and manganese (Mn). ) or an alloy thereof.

Here, the thickness of this metal film imparts wear resistance to the nitride ceramic material used as the base material of the high-temperature sliding member! Although there is no particular limitation as long as the film thickness is such that the surface roughness of the nitride ceramic exceeds the surface roughness of the nitride ceramic, it is preferably 0.1 to 5 μm. This is because if the thickness of the metal film is less than 0.1 μm, it is difficult to prevent the base material from being destroyed by the shear force generated on the friction surface during sliding, and if the thickness exceeds 5 μm, , At high temperatures, dimensional changes due to metal melting or oxidation become more severe.

This is because it is difficult to act as a sliding member.

The high-temperature sliding member of the present invention is formed by forming a metal film made of one of nickel (Ni), manganese (Mn), or an alloy thereof on the surface of the above-mentioned nitride ceramic base material.

Here, the coating and formation of the metal film on the surface of the nitride ceramic substrate is performed by physical vapor deposition. This physical vapor deposition (P
VD: Physical Vapor Dep
As mentioned above, as long as a metal film that can be used as a high-temperature sliding member can be coated and formed on the surface of a ceramic base material, the specific method is not specified, but vacuum evaporation method, Sputtering method.

Any method such as ion blating method may be used.

A typical manufacturing method of the high-temperature sliding member of the present invention can be simply described as follows.

First, a nitride ceramic having desired properties according to its purpose as a high-temperature sliding member is obtained by a conventional ceramic manufacturing method and used as a base material.

Next, the obtained nitride ceramic substrate is placed in a vacuum deposition device, sputtering device, etc., and a desired metal is applied to the surface of the nitride ceramic substrate by a physical vapor deposition method such as a vacuum deposition method or a sputtering method. A high-temperature sliding member according to the present invention is obtained by coating.

[Operation and effects of the invention]

The high-temperature sliding member 1 of the present invention is a sliding member that has excellent wear resistance in a high lDr atmosphere.

Although the mechanism by which the high-temperature sliding member of the present invention exhibits such effects is not yet clear, it is thought to be secondary.

That is, 1. The nitride ceramic or clay as the base material of the high-temperature sliding member of the present invention has excellent heat resistance, shows little deterioration in mechanical properties as the temperature rises, and can be used in high-temperature atmospheres such as 800'C or higher. 2 also has sufficient strength. The coefficient of thermal expansion is also small, so the amount of thermal deformation is small. The metal film formed on the surface of the nitride ceramic base material is a metal or an alloy thereof that is softer at a higher temperature than the base material, and blends well into the ceramic base material as a base. Further, this metal film does not easily react with the base material during the sliding process, and even if it does react with the base material, the reaction product is not fragile.

When this high-temperature sliding member is used as a sliding member in a high-temperature atmosphere, the load that acts on the friction surface due to sliding is received by the underlying ceramic base material, and the shear force due to friction is extremely absorbed by the soft metal thin film on the surface. So the uke is held. As a result, wear-promoting substances such as ceramic abrasion powder are not generated on the sliding surface, and the wear resistance of the base material and the mating material is significantly improved, and it is believed that excellent high-temperature sliding properties are exhibited.

The high-temperature sliding member of the present invention has excellent high-temperature sliding properties, heat resistance, and abrasion resistance, so it can be used as a sealing material for heat exchangers, a hair ring material used in molten metal, a hair ring material for turbochargers, etc. It can be widely used as a sliding member in an atmosphere.

〔Example〕

First, a 26×26× silicon nitride sintered body (Kyocera (manufactured by SN220)) was used as a nitride ceramic base material.
A 4 mm flat plate was prepared by drilling a hole with a diameter of 5 mm in the center and polishing it so that the surface roughness was 0.03 μm R2.

Next, this ceramic base material was placed in a vacuum evaporation device (JEOL (manufactured by 1 Kiku, JEE-5B), and 10-3 Pascal (
Pressure is reduced to 350-400°
The substrates were coated with the metals shown in Table 1 by heating to 40°C and performing vacuum deposition using a tungsten (W-) cotton basket. As a result, two high-temperature sliding members according to the present invention were obtained (
Sample numbers 3-6). still.

Sample number 1. 2. 7 and 8, using a sputtering device, the introduced gas was argon (Ar) gas,
Glow discharge was performed for 1 hour at a vacuum level of 4 Pa to coat the surface of the base material with nickel.

A performance evaluation test of the obtained high-temperature sliding member was conducted by a friction and wear test.

First, the obtained high-temperature sliding member was made into a sample plate.

Next, a silicon nitride sintered body (Kyocera (l ring housing: SN220: 26X26x
4mm in diameter and a surface roughness of 0.03μmR2) was machined so that a ring with a diameter of 25mm and a thickness of 1mm protruded from one side (the 2nd surface part), and a ring with a diameter of 10mm was formed in the center.
The sample plate B had an empty hole of mm. Next, sample plate A was placed on the test piece stand on the rotating shaft side of the high-temperature friction tester of the 1-collar type, and sample plate B was placed on the test piece stand on the pressurized shaft side, as shown in Table 2. A 1τ abrasion test was conducted under test conditions. The results obtained are shown in Table 1. Direction.

The amount of wear was obtained by measuring the change in weight of the sample plate. At that time, when the sample plate A is heated to a high temperature, the metal film is oxidized and the weight increases.

In order to avoid this problem, the difference between the weight of the sample plate after the test with a sliding distance of 120 m and the weight of the sample plate after the test with a sliding distance of 600 m was used as an index of the amount of wear. Further, for Sample No. 1 and Sample No. 2, the cross-sectional profile of the wear marks on the sample plate was obtained using a stylus roughness meter. The results are shown in FIGS. 1 and 2.

For comparison, a silicon nitride sintered body (similar to the above-mentioned ceramic base material) without a metal film was used as sample plate A (3 processes (material numbers C1 and C2).

And, the base material and sample 4 (3m01% Y2O3 partially stabilized zirconia (Zr02
:Made by Kyocera 0 Kiku: Z201. Comparative tests were conducted in the same manner using sample numbers 03 to C9) and the same configuration as described above, except for sample numbers 03 to C9). The obtained results are also shown in Table 1. In addition, for sample numbers c1 and c2, sample plate A
The cross-sectional profile of the wear scar was obtained using a stylus roughness meter. The results are shown in FIGS. 3 and 4.

As is clear from the results of Table 1, Table 2, and the friction test conditions above, the high/! j
It can be seen that when a sliding member is used, it has excellent wear resistance in a high-temperature atmosphere.

[Brief explanation of drawings]

Figure 1 is a diagram showing the cross-sectional profile of the wear marks on sample plate A after the friction and wear test in the example of the present invention. Figure 1 is the diagram for sample number 1, and Figure 2 is the diagram for sample number 2. , FIG. 3 is a diagram of sample number C1, and FIG. 4 is a diagram of sample number C2.

Claims (3)

[Claims] (1) A high-temperature sliding member characterized in that a metal film made of nickel, manganese, or an alloy thereof is formed on a base material made of nitride ceramics by physical vapor deposition. (2) The high-temperature sliding member according to claim (1), wherein the metal film has a thickness of 0.1 μm to 5 μm. (3) The high-temperature sliding member according to claim (1), wherein the nitride ceramic is a silicon nitride ceramic.