JPS6294634U - - Google Patents

Info

Publication number
JPS6294634U
JPS6294634U JP18681185U JP18681185U JPS6294634U JP S6294634 U JPS6294634 U JP S6294634U JP 18681185 U JP18681185 U JP 18681185U JP 18681185 U JP18681185 U JP 18681185U JP S6294634 U JPS6294634 U JP S6294634U
Authority
JP
Japan
Prior art keywords
probe card
mounting position
probe
card
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18681185U
Other languages
English (en)
Other versions
JPH037953Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18681185U priority Critical patent/JPH037953Y2/ja
Publication of JPS6294634U publication Critical patent/JPS6294634U/ja
Application granted granted Critical
Publication of JPH037953Y2 publication Critical patent/JPH037953Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は本案装置の分解斜視図、第２図はプロ
ーブカード製作状態を示す断面図である。 １：ベースボード、２，３：基準ピン、４：セ
ツテイングマスク、４ｂ：パツド、５：プローブ
カード、６：接触針。

Claims (1)

    【実用新案登録請求の範囲】
  1. プローブカード製作に使用される治具としての
    ベースボードの、プロービングマシンのプローブ
    カード取付位置に設けられたカードの位置、方向
    を規制する基準ピンと同一の関係位置に、測定す
    べき半導体チツプの電極パツドと整合するパター
    ンを予め形成してあるセツテイングマスクとプロ
    ーブカードの取付位置を規制する基準ピンを設け
    たことを特徴とするプローブカードの製作装置。
JP18681185U 1985-12-04 1985-12-04 Expired JPH037953Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18681185U JPH037953Y2 (ja) 1985-12-04 1985-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18681185U JPH037953Y2 (ja) 1985-12-04 1985-12-04

Publications (2)

Publication Number Publication Date
JPS6294634U true JPS6294634U (ja) 1987-06-17
JPH037953Y2 JPH037953Y2 (ja) 1991-02-27

Family

ID=31136708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18681185U Expired JPH037953Y2 (ja) 1985-12-04 1985-12-04

Country Status (1)

Country Link
JP (1) JPH037953Y2 (ja)

Also Published As

Publication number Publication date
JPH037953Y2 (ja) 1991-02-27

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