JPS629302Y2 - - Google Patents

Info

Publication number
JPS629302Y2
JPS629302Y2 JP12160982U JP12160982U JPS629302Y2 JP S629302 Y2 JPS629302 Y2 JP S629302Y2 JP 12160982 U JP12160982 U JP 12160982U JP 12160982 U JP12160982 U JP 12160982U JP S629302 Y2 JPS629302 Y2 JP S629302Y2
Authority
JP
Japan
Prior art keywords
plasma
reaction chamber
processing apparatus
processing
exhaust port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12160982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5928535U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12160982U priority Critical patent/JPS5928535U/ja
Publication of JPS5928535U publication Critical patent/JPS5928535U/ja
Application granted granted Critical
Publication of JPS629302Y2 publication Critical patent/JPS629302Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Coating Apparatus (AREA)
JP12160982U 1982-08-12 1982-08-12 プラズマ処理装置 Granted JPS5928535U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12160982U JPS5928535U (ja) 1982-08-12 1982-08-12 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12160982U JPS5928535U (ja) 1982-08-12 1982-08-12 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS5928535U JPS5928535U (ja) 1984-02-22
JPS629302Y2 true JPS629302Y2 (cg-RX-API-DMAC7.html) 1987-03-04

Family

ID=30278261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12160982U Granted JPS5928535U (ja) 1982-08-12 1982-08-12 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS5928535U (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348194Y2 (cg-RX-API-DMAC7.html) * 1985-04-30 1991-10-15

Also Published As

Publication number Publication date
JPS5928535U (ja) 1984-02-22

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