JPS6291439U - - Google Patents
Info
- Publication number
- JPS6291439U JPS6291439U JP18342785U JP18342785U JPS6291439U JP S6291439 U JPS6291439 U JP S6291439U JP 18342785 U JP18342785 U JP 18342785U JP 18342785 U JP18342785 U JP 18342785U JP S6291439 U JPS6291439 U JP S6291439U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- processed
- processing chamber
- chamber
- charging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007599 discharging Methods 0.000 claims 2
- 239000007789 gas Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18342785U JPS6291439U (zh) | 1985-11-27 | 1985-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18342785U JPS6291439U (zh) | 1985-11-27 | 1985-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6291439U true JPS6291439U (zh) | 1987-06-11 |
Family
ID=31130151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18342785U Pending JPS6291439U (zh) | 1985-11-27 | 1985-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6291439U (zh) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02130925A (ja) * | 1988-11-11 | 1990-05-18 | Tel Sagami Ltd | 縦型加圧酸化装置 |
| JPH0372649A (ja) * | 1989-08-11 | 1991-03-27 | Tokyo Electron Sagami Ltd | 処理装置 |
| JPH05198659A (ja) * | 1992-01-22 | 1993-08-06 | Tokyo Ohka Kogyo Co Ltd | プラズマ処理装置 |
| JPH06177225A (ja) * | 1992-08-31 | 1994-06-24 | Matsushita Electric Ind Co Ltd | 環境制御装置 |
| JPH07297145A (ja) * | 1995-03-02 | 1995-11-10 | Tokyo Electron Tohoku Ltd | 熱処理装置 |
| JP2015141994A (ja) * | 2014-01-28 | 2015-08-03 | 東京エレクトロン株式会社 | 支持機構及び基板処理装置 |
-
1985
- 1985-11-27 JP JP18342785U patent/JPS6291439U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02130925A (ja) * | 1988-11-11 | 1990-05-18 | Tel Sagami Ltd | 縦型加圧酸化装置 |
| JPH0372649A (ja) * | 1989-08-11 | 1991-03-27 | Tokyo Electron Sagami Ltd | 処理装置 |
| JPH05198659A (ja) * | 1992-01-22 | 1993-08-06 | Tokyo Ohka Kogyo Co Ltd | プラズマ処理装置 |
| JPH06177225A (ja) * | 1992-08-31 | 1994-06-24 | Matsushita Electric Ind Co Ltd | 環境制御装置 |
| JPH07297145A (ja) * | 1995-03-02 | 1995-11-10 | Tokyo Electron Tohoku Ltd | 熱処理装置 |
| JP2015141994A (ja) * | 2014-01-28 | 2015-08-03 | 東京エレクトロン株式会社 | 支持機構及び基板処理装置 |