JPS6291433U - - Google Patents

Info

Publication number
JPS6291433U
JPS6291433U JP18393385U JP18393385U JPS6291433U JP S6291433 U JPS6291433 U JP S6291433U JP 18393385 U JP18393385 U JP 18393385U JP 18393385 U JP18393385 U JP 18393385U JP S6291433 U JPS6291433 U JP S6291433U
Authority
JP
Japan
Prior art keywords
manifold
ring
vapor phase
phase growth
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18393385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530352Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985183933U priority Critical patent/JPH0530352Y2/ja
Publication of JPS6291433U publication Critical patent/JPS6291433U/ja
Application granted granted Critical
Publication of JPH0530352Y2 publication Critical patent/JPH0530352Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1985183933U 1985-11-28 1985-11-28 Expired - Lifetime JPH0530352Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985183933U JPH0530352Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-11-28 1985-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985183933U JPH0530352Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-11-28 1985-11-28

Publications (2)

Publication Number Publication Date
JPS6291433U true JPS6291433U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-11
JPH0530352Y2 JPH0530352Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-03

Family

ID=31131125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985183933U Expired - Lifetime JPH0530352Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-11-28 1985-11-28

Country Status (1)

Country Link
JP (1) JPH0530352Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607122A (ja) * 1983-06-01 1985-01-14 アムテック・システムズ・インコーポレーテッド 炉中での複数の半導体ウェハを処理する方法および装置
JPS6031000U (ja) * 1983-08-09 1985-03-02 ウシオ電機株式会社 光照射炉

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607122A (ja) * 1983-06-01 1985-01-14 アムテック・システムズ・インコーポレーテッド 炉中での複数の半導体ウェハを処理する方法および装置
JPS6031000U (ja) * 1983-08-09 1985-03-02 ウシオ電機株式会社 光照射炉

Also Published As

Publication number Publication date
JPH0530352Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-03

Similar Documents

Publication Publication Date Title
JPS6291433U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS635626U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6210638U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62136222U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0160531U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS589195Y2 (ja) 焼成炉の炊き口密閉装置
JPH0229521U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6445159U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6255560U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS60149132U (ja) 半導体熱処理炉
JPS62145325U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61150501U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH02102728U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH01100432U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6291094U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63201325U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61147274U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH026111U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH01133589U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6151730U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6255165U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62168461U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH038426U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0175702U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH02104629U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)