JPS6291428A - Production of glass - Google Patents

Production of glass

Info

Publication number
JPS6291428A
JPS6291428A JP23257785A JP23257785A JPS6291428A JP S6291428 A JPS6291428 A JP S6291428A JP 23257785 A JP23257785 A JP 23257785A JP 23257785 A JP23257785 A JP 23257785A JP S6291428 A JPS6291428 A JP S6291428A
Authority
JP
Japan
Prior art keywords
sol
glass
class
foreign material
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23257785A
Other languages
Japanese (ja)
Inventor
Tetsuhiko Takeuchi
哲彦 竹内
Sadao Kanbe
貞男 神戸
Motoyuki Toki
元幸 土岐
Satoru Miyashita
悟 宮下
Hirohito Kitabayashi
北林 宏仁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP23257785A priority Critical patent/JPS6291428A/en
Publication of JPS6291428A publication Critical patent/JPS6291428A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C03C1/006Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/12Other methods of shaping glass by liquid-phase reaction processes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Silicon Compounds (AREA)

Abstract

PURPOSE:To prevent a foreign material such as refuse from mixing with glass and to enable the production of high-quality glass contg. less inner foreign material in a producing method of glass due to a sol-gel process by performing the preparation of sol in the clean atmosphere. CONSTITUTION:In such case that glass is produced by a sol-gel process, (A) the preparation of sol is performed in the clean atmosphere and (B) the preparation of sol is performed in the inside of a clean room cleaner than class 10000 and (C) during the preparing processes of sol, the process after a separation process removing a foreign material (refuse, a coarse silica grain and etc.) from sol is performed in the inside of the clean room cleaner than class 1000 and (D) a process charging the prepared sol in a desirably shaped vessel is performed in the atmosphere cleaner than class 100. Wherein 'class' is shown in >=0.5mump concn. (piece/ft<2>) of a floated grain. In such a way, remarkably high-quality glass contg. less inner foreign material is obtained by preparing sol in a clean atmosphere.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、ゾル−ゲル法によるガラスの製造方法に関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for producing glass by a sol-gel method.

〔発明概要〕[Summary of the invention]

本発明は、ゾル−ゲル法(よるガラスの製造方法におい
て、ゾル調製を清浄な雰囲気下で行なうことにより、ゾ
ル中へのゴミ等の異物の混入を防ぎ、内部異物の少ない
非常に高品質なガラスの作製が可能になるものである。
The present invention is a method for producing glass using the sol-gel method. By preparing the sol in a clean atmosphere, the incorporation of foreign substances such as dust into the sol is prevented, and extremely high quality glass with few internal foreign substances is produced. This makes it possible to manufacture glass.

    。    .

〔従来の技術〕[Conventional technology]

ゾル−ゲル法によるガラス製造においては、ゾル調製を
行なう雰囲気の清浄度に関しては、特に管理されていな
かった。
In glass production by the sol-gel method, the cleanliness of the atmosphere in which the sol is prepared has not been particularly controlled.

〔発明が解決しようとする問題点及び目的〕しかし、前
述の従来技術では、ゾル調製を行なう雰囲気の清浄度を
′#埋していないため、空気中に脊圧する多数の微小異
物(ゴミ、ホコリなど)がゾル中に混入し、作製したガ
ラス中に残存する。
[Problems and Objectives to be Solved by the Invention] However, the above-mentioned prior art does not ensure the cleanliness of the atmosphere in which the sol is prepared. etc.) are mixed into the sol and remain in the manufactured glass.

またゾル調製時、室内の清浄度が一定でないため19.
室’、:、lF2− 作製したガラス中の異物数にバラツキが生(二、安定し
た品買のガラス製造が困雌であるという問題点を有する
Also, when preparing the sol, the cleanliness in the room is not constant, so 19.
Chamber':,lF2- There is a problem that the number of foreign substances in the glass produced varies (2) It is difficult to manufacture glass with stable purchase.

そこで本発明はこのような問題点を解決するもので、そ
の目的とするところは、従来技術に欠けていたゾル調製
を行なう際室内の清浄度を管理することにより高品質な
ガラスを安定生産可能なゾル−ゲル法によるガラスの製
造方法を提供するところにある。
The present invention is intended to solve these problems, and its purpose is to make it possible to stably produce high-quality glass by controlling the cleanliness of the room during sol preparation, which was lacking in the conventional technology. An object of the present invention is to provide a method for manufacturing glass using a sol-gel method.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の方法は、ゾル−ゲル法によるガラスの製造にお
いて、ゾル調製を清浄な雰囲気下で行なうことを特徴と
するガラスの製造方法。
The method of the present invention is a glass manufacturing method characterized by performing sol preparation in a clean atmosphere in glass manufacturing by a sol-gel method.

〔作用〕[Effect]

本発明によれば、ゾル調製の際、外部からの異物(ゴミ
、ホコリなど)の混入がほとんどないために、該ゾルを
ゲル化、乾燥、焼結して得られるガラス内部にも異物が
存在せず、高品質なガラスを製造できる。また、アルキ
ルゾレケートを主原料としそゾルxmしAt、T I、
Na、Ca、G。
According to the present invention, since there is almost no foreign matter (dirt, dust, etc.) mixed in from the outside during sol preparation, foreign matter is also present inside the glass obtained by gelling, drying, and sintering the sol. High-quality glass can be manufactured without the need for In addition, sosol xm using alkyl zorecate as the main raw material is At, T I,
Na, Ca, G.

などを、ゾル中に添加することにより、種々の多成分系
で篩晶直なガラスの作製が容易である。
By adding such as to the sol, it is easy to produce various multi-component glasses with straight sieve crystals.

〔実施例〕〔Example〕

1) 重数のエチル/リケード28(Si(OEt)4
 )162tα01NHae108tおよび超微粒子ノ
リ力(1荀品名:アエUジルoxso(デグサ社))4
5に7を同時に混合シ2、ディシルバー(攪拌分散装置
’ll )にて攪拌を4時間行ない、エチルシリク”−
トの加水分解反応を行なうと共に超微粒子シリカのある
程度分数したゾルを調製し、この後さらに外敵性を向上
させるため、該ゾルに、超音波照射(攪拌併用)を5時
間行なった。なお、この際、超斤波照射による該ゾル温
度の上昇を防ぐため、冷却装[dにより該ゾル温度を一
定に保持した。
1) Polymer number ethyl/licade 28 (Si(OEt)4
) 162tα01NHae108t and ultrafine particle glue force (1 product name: Ae Uji oxso (Degussa)) 4
Mix 5 and 7 at the same time and stir for 4 hours using a disilver (stirring and dispersing device) to obtain ethylsilic.
At the same time, a sol containing a certain fraction of ultrafine silica particles was prepared, and in order to further improve its external resistance, the sol was subjected to ultrasonic irradiation (combined with stirring) for 5 hours. At this time, in order to prevent the sol temperature from increasing due to the supercalf wave irradiation, the sol temperature was kept constant using a cooling device [d].

次工程として、該ゾル中の半ゲル化ゼリー状物や、不純
物含有粒大粒子およびゴミなどを除去するため該ゾルに
対し遠心分離処理(3000rmp。
As the next step, the sol is centrifuged (3000 rpm) to remove semi-gelled jelly-like substances, large particles containing impurities, and dust.

10〜30rlin)を加えた。この後、さらに該ゾル
を濾過し、異物を除去した。そして、該ゾルを攪拌1゛
□ながら、CLINアンモニア水を崗rし、””   
      −’ 4− PH値な3〜6に調贅し、20分間情押した後、この際
に生じたゲル小片などを除去するため、再遠心分111
(30[11[]]rpII+、10−10−5O)、
再沖過の処理を施し、大きさ36×24×12〔11n
[のポリプロピレン製容器に各600 F、計400個
に投入し、密閉状態にてゲル化させた。この後、収縮が
始まった時点で、容器のフタを乾燥速度調節のため穴の
あいた所定の開孔率のものに変え、乾燥機に入れ、室温
から昇温速度5 C/ h rで60〜80℃に加熱し
、以後このm度に保持し、10〜15日間で大きさく2
5±(L5 )X(15±α5)×(α5±0.2)(
−の乾燥ゲルを得た。
10-30 rlin) was added. After this, the sol was further filtered to remove foreign substances. Then, while stirring the sol, add CLIN ammonia water.
-' 4- After adjusting the pH value to 3 to 6 and pressing for 20 minutes, centrifugation was performed for 111 minutes to remove gel particles generated at this time.
(30[11[]]rpII+, 10-10-5O),
After undergoing re-offing treatment, the size is 36 x 24 x 12 [11n].
A total of 400 containers, each at 600 F, were placed in polypropylene containers and gelatinized in a sealed state. After that, when the shrinkage starts, change the lid of the container to one with a predetermined porosity with holes to adjust the drying speed, put it in a dryer, and heat it from room temperature at a heating rate of 5 C/hr to 60~60 hr. Heat it to 80℃ and keep it at this temperature for 10 to 15 days until it grows to 2.
5±(L5)X(15±α5)×(α5±0.2)(
- dry gel was obtained.

これらの乾燥ゲルを焼結炉に投入し所定の昇温方法によ
り加熱焼結し、1300〜1450Cにて透明なガラス
体を4た。このガラスの大きさは(18±α5)X(1
1±[L5)X(α6±0.05)〔句で、重址は18
0±5〔t〕であった。
These dried gels were placed in a sintering furnace and heated and sintered using a predetermined heating method to form a transparent glass body at 1300 to 1450C. The size of this glass is (18±α5)×(1
1±[L5)X(α6±0.05)
It was 0±5 [t].

以上のようにして痔たガラスを、光学顕微鏡、集光ラン
プなどで観察したところ、ガラス中に異物(大きさO〜
200μm程度)が存在し、それらの数は谷ガラスによ
りかなりの差があった。
When the hemorrhoidal glass was observed using an optical microscope or a condensing lamp, it was found that there was a foreign object (size O ~
200 μm), and their number varied considerably depending on the valley glass.

また、これらのガラスに関する諸物性分析の結果は、ビ
ッカース硬度、化石、熱膨張係数、赤外吸収スペクトル
、近赤外吸収スペクトル、屈折率など溶融石健ガラヌと
全く一致していた。
In addition, the results of various physical property analyzes regarding these glasses were completely consistent with those of the fused stone Kengaranu, including Vickers hardness, fossilization, coefficient of thermal expansion, infrared absorption spectrum, near-infrared absorption spectrum, and refractive index.

なお、ここでは、ゾル調製プロ士スにおいて、室内の清
浄度に関して全く管理していなかった。
In this case, the sol preparation process did not control the cleanliness of the room at all.

2)実施例1と全く同様の方法にて石英ガラスの製造を
行った。しかし、ここでは、ゾル調製の全工程を、クラ
ス10,000のクリーンルーム内で行なった。この際
に得られたガラスを実施例1と同様に、光学顕微鏡、集
光ランプなどで観察したところやはり、ガラス中に異物
が存在するものの、実施例1に比べ、異物数および各ガ
ラスによるバラツキは非常に小さくなった。
2) Silica glass was manufactured in exactly the same manner as in Example 1. However, here, the entire sol preparation process was performed in a class 10,000 clean room. The glass obtained at this time was observed using an optical microscope, condensing lamp, etc. in the same manner as in Example 1. Although there were foreign substances in the glass, compared to Example 1, the number of foreign substances and the variation among each glass were found. has become very small.

3)実施例1と全く同様の方法にて石英ガラスの製造を
行なった。しかし、ここではゾル調製プロセス中の、遠
心分離以降8器投入までの工程をクラス800のクリー
ンルーム内で行なった。この際に得られたガラスを実施
例1と同様に、光学″′r−6− 顕微鏡および集光ランプなどで観察したところ、実施例
2よりもさらに、異物数および各ガラスによるバラツキ
は小さくなった。
3) Silica glass was produced in exactly the same manner as in Example 1. However, in this case, the steps in the sol preparation process from centrifugation to input into eight vessels were performed in a class 800 clean room. When the glass obtained at this time was observed using an optical microscope and a condensing lamp in the same manner as in Example 1, it was found that the number of foreign substances and the variation among each glass were smaller than in Example 2. Ta.

4)実施例1〜6と同様の方法にて石英ガラスの製造を
行なったが、ここでは、調製ゾルの最終濾過から容器投
入までの工相をクラス0〜100の清浄な雰囲気で行な
った。この際に得られたガラスを同様に光学顕微鏡およ
び集光ランプで観祭したところ、各ガラス内にほとんど
異物が存在17なかった表1に実施例1〜4で得られた
石鍵ガラヌ中の異物数の比較を示す。
4) Silica glass was produced in the same manner as in Examples 1 to 6, except that the entire process from final filtration of the prepared sol to charging into a container was carried out in a class 0 to 100 clean atmosphere. When the glasses obtained at this time were similarly inspected using an optical microscope and a condensing lamp, there were almost no foreign substances in each glass. A comparison of the number of foreign objects is shown.

表1. ガラス内異′吻の比較 〔発明の効果〕 このように、本発明により製造される6鍵ガラスは、ゾ
ルA製を清浄な雰囲気で行なうため外部からの異物の混
入がなく、シたがってガラス中にも異物のない高品質な
ものとなる。また従来と異なり製品間でのバラツキがほ
とんどなく歩留り良く高品ノ直な6鍵ガラスを製造でき
る。
Table 1. Comparison of proboscis within the glass [Effect of the invention] As described above, the six-key glass manufactured by the present invention is manufactured in a clean atmosphere, so there is no contamination of foreign matter from the outside, and therefore the glass It will be of high quality with no foreign substances inside. Moreover, unlike the conventional method, there is almost no variation between products, and it is possible to manufacture high-quality 6-key glass at a high yield.

以上、溶融法などに比べ低コストであるなどの□利点を
有する上に、非常に高品質な石英ガラスが容易に大址生
11’ljT能であり、これまで石英ガラスを使用して
いた分野ではもちろんのこと、rc用フォトマスク基板
、光フアイバー用母材なと1粛々の分野に応用が広〃I
るものと考える。また、^l。
As mentioned above, in addition to having advantages such as low cost compared to the fusion method, very high quality quartz glass can be easily manufactured and used in fields where quartz glass has been used up until now. Of course, it has wide applications in many fields such as RC photomask substrates and optical fiber base materials.
think of it as something that Also, ^l.

TI、Go、Na、Mg、Ll、Teaどの誦元素を、
ゾルfA製時に添加することにより多成分系で高品質な
ガラスの作製も可能である。
Reciting elements such as TI, Go, Na, Mg, Ll, Tea, etc.
By adding it during the production of Sol fA, it is also possible to produce a multi-component glass of high quality.

以上that's all

Claims (1)

【特許請求の範囲】[Claims] (1)ゾルーゲル法によるガラスの製造において、ゾル
調製プロセス中に以下の条件を有することを特徴とする
ガラスの製造方法。 a)ゾル調製を清浄な雰囲気で行なう b)ゾル調製をクラス10,000より清浄なクリーン
ルーム内で行なう c)ゾル調製プロセス中、ゾルからの異物(ゴミ、粗大
シリカ粒子など)の分離工程以降をクラス1,000よ
り清浄なクリーンルーム内で行なうd)調製ゾルを所望
形状の容器に投入する工程をクラス100より清浄な雰
囲気で行なう (但し、「クラス」とは0.5μmp以上の浮遊粒子の
濃度〔個/ft^3〕を表わす。)
(1) A method for producing glass by the sol-gel method, characterized in that the following conditions are met during the sol preparation process. a) Perform the sol preparation in a clean atmosphere b) Perform the sol preparation in a clean room that is cleaner than class 10,000 c) During the sol preparation process, after the step of separating foreign substances (dust, coarse silica particles, etc.) from the sol d) The step of charging the prepared sol into a container of the desired shape is carried out in a clean room that is cleaner than Class 1,000 (however, "class" refers to the concentration of suspended particles of 0.5 μmp or higher). Represents [pieces/ft^3].)
JP23257785A 1985-10-18 1985-10-18 Production of glass Pending JPS6291428A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23257785A JPS6291428A (en) 1985-10-18 1985-10-18 Production of glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23257785A JPS6291428A (en) 1985-10-18 1985-10-18 Production of glass

Publications (1)

Publication Number Publication Date
JPS6291428A true JPS6291428A (en) 1987-04-25

Family

ID=16941529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23257785A Pending JPS6291428A (en) 1985-10-18 1985-10-18 Production of glass

Country Status (1)

Country Link
JP (1) JPS6291428A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5017354A (en) * 1988-09-02 1991-05-21 Akzo America Inc. Process for production of high purity silica gel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5017354A (en) * 1988-09-02 1991-05-21 Akzo America Inc. Process for production of high purity silica gel

Similar Documents

Publication Publication Date Title
US4826521A (en) Method of manufacturing articles of extremely pure synthetic particulate silicon dioxide
JPS6291428A (en) Production of glass
JPH0524853A (en) Production of quartz glass
JPS59131538A (en) Production of quartz glass
JPS61168541A (en) Production of quartz glass
JPS6065735A (en) Production of quartz glass
JPS60239329A (en) Manufacture of quartz glass
JPS62207723A (en) Production of glass
JPS6140825A (en) Preparation of quartz glass
JPH03137028A (en) Production of large-sized massive glass
JPS61232232A (en) Production of quartz glass
JPS61232231A (en) Production of quartz glass
JPS6158818A (en) Manufacture of quartz glass
JPS63117919A (en) Production of glass
JPS62100424A (en) Production of glass
JPH0348140B2 (en)
JPS63112430A (en) Production of glass
JPS6291429A (en) Production of glass
JPS60108324A (en) Production of quartz glass
JPH035329A (en) Production of synthetic quartz glass
JPH01145331A (en) Production of glass
JPS63195134A (en) Production of glass
JPS61158833A (en) Production of quartz glass
JPS61256927A (en) Production of quartz glass
JPS63291822A (en) Production of large-sized glass block