JPS6291338U - - Google Patents
Info
- Publication number
- JPS6291338U JPS6291338U JP18389685U JP18389685U JPS6291338U JP S6291338 U JPS6291338 U JP S6291338U JP 18389685 U JP18389685 U JP 18389685U JP 18389685 U JP18389685 U JP 18389685U JP S6291338 U JPS6291338 U JP S6291338U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- section
- ion source
- low
- arc discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010891 electric arc Methods 0.000 claims description 4
- 230000001788 irregular Effects 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18389685U JPS6291338U (en, 2012) | 1985-11-27 | 1985-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18389685U JPS6291338U (en, 2012) | 1985-11-27 | 1985-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6291338U true JPS6291338U (en, 2012) | 1987-06-11 |
Family
ID=31131051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18389685U Pending JPS6291338U (en, 2012) | 1985-11-27 | 1985-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6291338U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005183382A (ja) * | 2003-12-19 | 2005-07-07 | Samsung Electronics Co Ltd | イオンソース及びこれを有するイオン注入装置 |
-
1985
- 1985-11-27 JP JP18389685U patent/JPS6291338U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005183382A (ja) * | 2003-12-19 | 2005-07-07 | Samsung Electronics Co Ltd | イオンソース及びこれを有するイオン注入装置 |