JPH0179254U - - Google Patents

Info

Publication number
JPH0179254U
JPH0179254U JP1987175577U JP17557787U JPH0179254U JP H0179254 U JPH0179254 U JP H0179254U JP 1987175577 U JP1987175577 U JP 1987175577U JP 17557787 U JP17557787 U JP 17557787U JP H0179254 U JPH0179254 U JP H0179254U
Authority
JP
Japan
Prior art keywords
filament
ion source
mounting bracket
current introduction
introduction terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987175577U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987175577U priority Critical patent/JPH0179254U/ja
Publication of JPH0179254U publication Critical patent/JPH0179254U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1987175577U 1987-11-16 1987-11-16 Pending JPH0179254U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987175577U JPH0179254U (en, 2012) 1987-11-16 1987-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987175577U JPH0179254U (en, 2012) 1987-11-16 1987-11-16

Publications (1)

Publication Number Publication Date
JPH0179254U true JPH0179254U (en, 2012) 1989-05-29

Family

ID=31467365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987175577U Pending JPH0179254U (en, 2012) 1987-11-16 1987-11-16

Country Status (1)

Country Link
JP (1) JPH0179254U (en, 2012)

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