JPH02115245U - - Google Patents
Info
- Publication number
- JPH02115245U JPH02115245U JP2370289U JP2370289U JPH02115245U JP H02115245 U JPH02115245 U JP H02115245U JP 2370289 U JP2370289 U JP 2370289U JP 2370289 U JP2370289 U JP 2370289U JP H02115245 U JPH02115245 U JP H02115245U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- members
- ion source
- grooves
- mounting structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2370289U JPH02115245U (en, 2012) | 1989-03-01 | 1989-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2370289U JPH02115245U (en, 2012) | 1989-03-01 | 1989-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02115245U true JPH02115245U (en, 2012) | 1990-09-14 |
Family
ID=31242911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2370289U Pending JPH02115245U (en, 2012) | 1989-03-01 | 1989-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02115245U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009163985A (ja) * | 2008-01-07 | 2009-07-23 | Nissin Ion Equipment Co Ltd | フィラメント保持構造およびそれを備えるイオン源 |
-
1989
- 1989-03-01 JP JP2370289U patent/JPH02115245U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009163985A (ja) * | 2008-01-07 | 2009-07-23 | Nissin Ion Equipment Co Ltd | フィラメント保持構造およびそれを備えるイオン源 |