JPS6291338U - - Google Patents
Info
- Publication number
- JPS6291338U JPS6291338U JP18389685U JP18389685U JPS6291338U JP S6291338 U JPS6291338 U JP S6291338U JP 18389685 U JP18389685 U JP 18389685U JP 18389685 U JP18389685 U JP 18389685U JP S6291338 U JPS6291338 U JP S6291338U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- section
- ion source
- low
- arc discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010891 electric arc Methods 0.000 claims description 4
- 230000001788 irregular Effects 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第1図aはこの考案の一実施例を示すフイラメ
ントの側面図、同図bはその断面図、第2図aは
この考案の他の実施例を示すフイラメントの側面
図、同図bはその断面図、第3図は従来の低電圧
アーク放電型イオン源を示す断面図である。
1a,1b…フイラメント。
Fig. 1a is a side view of a filament showing one embodiment of this invention, Fig. 2b is a sectional view thereof, Fig. 2a is a side view of a filament showing another embodiment of this invention, and Fig. 2b is a side view of the filament. 3 is a cross-sectional view showing a conventional low-voltage arc discharge type ion source. 1a, 1b... filament.
Claims (1)
したことを特徴とする低電圧アーク放電型イオン
源。 (2) 熱電子発生用フイラメントを、異形断面の
単線フイラメントで形成して断面非円形としたこ
とを特徴とする実用新案登録請求の範囲第1項記
載の低電圧アーク放電型イオン源。 (3) 熱電子発生用フイラメントを、細線フイラ
メントの集合体で形成して断面非円形としたこと
を特徴とする実用新案登録請求の範囲第1項記載
の低電圧アーク放電型イオン源。[Claims for Utility Model Registration] (1) A low-voltage arc discharge type ion source characterized in that a filament for generating thermionic electrons has a non-circular cross section. (2) The low-voltage arc discharge type ion source according to claim 1, wherein the filament for generating thermionic electrons is formed of a single wire filament with an irregular cross section so that the cross section is non-circular. (3) The low-voltage arc discharge type ion source according to claim 1, wherein the filament for generating thermionic electrons is formed of an aggregate of fine wire filaments and has a non-circular cross section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18389685U JPS6291338U (en) | 1985-11-27 | 1985-11-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18389685U JPS6291338U (en) | 1985-11-27 | 1985-11-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6291338U true JPS6291338U (en) | 1987-06-11 |
Family
ID=31131051
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18389685U Pending JPS6291338U (en) | 1985-11-27 | 1985-11-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6291338U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005183382A (en) * | 2003-12-19 | 2005-07-07 | Samsung Electronics Co Ltd | Ion source and ion implanting device having the same |
-
1985
- 1985-11-27 JP JP18389685U patent/JPS6291338U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005183382A (en) * | 2003-12-19 | 2005-07-07 | Samsung Electronics Co Ltd | Ion source and ion implanting device having the same |
JP4589096B2 (en) * | 2003-12-19 | 2010-12-01 | 三星電子株式会社 | Ion source and ion implantation apparatus having the same |