JPH0166741U - - Google Patents
Info
- Publication number
- JPH0166741U JPH0166741U JP1987161615U JP16161587U JPH0166741U JP H0166741 U JPH0166741 U JP H0166741U JP 1987161615 U JP1987161615 U JP 1987161615U JP 16161587 U JP16161587 U JP 16161587U JP H0166741 U JPH0166741 U JP H0166741U
- Authority
- JP
- Japan
- Prior art keywords
- arc chamber
- hot cathode
- ion source
- coil
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図はこの考案の一実施例の斜視図、第２図
はこの考案の他の実施例の斜視図、第３図はアー
クチヤンバ内に装着された従来の熱陰極を示す断
面図である。
１，２，１１……熱陰極、１０……アークチヤ
ンバ。
FIG. 1 is a perspective view of one embodiment of this invention, FIG. 2 is a perspective view of another embodiment of this invention, and FIG. 3 is a sectional view showing a conventional hot cathode installed in an arc chamber. 1, 2, 11... hot cathode, 10... arc chamber.
Claims (1)
されたイオン源の熱陰極において、 前記アークチヤンバ内にコイル状で装着されて
いることを特徴とするイオン源の熱陰極。[Claims for Utility Model Registration] A hot cathode of an ion source installed in an arc chamber for generating plasma, characterized in that the hot cathode of an ion source is installed in the arc chamber in the form of a coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161615U JPH0166741U (en) | 1987-10-21 | 1987-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161615U JPH0166741U (en) | 1987-10-21 | 1987-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0166741U true JPH0166741U (en) | 1989-04-28 |
Family
ID=31444713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987161615U Pending JPH0166741U (en) | 1987-10-21 | 1987-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0166741U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0468348U (en) * | 1990-10-24 | 1992-06-17 |
-
1987
- 1987-10-21 JP JP1987161615U patent/JPH0166741U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0468348U (en) * | 1990-10-24 | 1992-06-17 |