JPS6290777U - - Google Patents
Info
- Publication number
- JPS6290777U JPS6290777U JP18379985U JP18379985U JPS6290777U JP S6290777 U JPS6290777 U JP S6290777U JP 18379985 U JP18379985 U JP 18379985U JP 18379985 U JP18379985 U JP 18379985U JP S6290777 U JPS6290777 U JP S6290777U
- Authority
- JP
- Japan
- Prior art keywords
- fixing part
- substrate holding
- substrate
- resist solution
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000004528 spin coating Methods 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18379985U JPS6290777U (enExample) | 1985-11-29 | 1985-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18379985U JPS6290777U (enExample) | 1985-11-29 | 1985-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6290777U true JPS6290777U (enExample) | 1987-06-10 |
Family
ID=31130867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18379985U Pending JPS6290777U (enExample) | 1985-11-29 | 1985-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6290777U (enExample) |
-
1985
- 1985-11-29 JP JP18379985U patent/JPS6290777U/ja active Pending
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