JPS63110033U - - Google Patents
Info
- Publication number
- JPS63110033U JPS63110033U JP140187U JP140187U JPS63110033U JP S63110033 U JPS63110033 U JP S63110033U JP 140187 U JP140187 U JP 140187U JP 140187 U JP140187 U JP 140187U JP S63110033 U JPS63110033 U JP S63110033U
- Authority
- JP
- Japan
- Prior art keywords
- film
- forming
- solid
- barrier
- molecules
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP140187U JPS63110033U (enExample) | 1987-01-08 | 1987-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP140187U JPS63110033U (enExample) | 1987-01-08 | 1987-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110033U true JPS63110033U (enExample) | 1988-07-15 |
Family
ID=30779276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP140187U Pending JPS63110033U (enExample) | 1987-01-08 | 1987-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110033U (enExample) |
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1987
- 1987-01-08 JP JP140187U patent/JPS63110033U/ja active Pending