JPS6289143U - - Google Patents

Info

Publication number
JPS6289143U
JPS6289143U JP18000285U JP18000285U JPS6289143U JP S6289143 U JPS6289143 U JP S6289143U JP 18000285 U JP18000285 U JP 18000285U JP 18000285 U JP18000285 U JP 18000285U JP S6289143 U JPS6289143 U JP S6289143U
Authority
JP
Japan
Prior art keywords
grooves
storage cassette
display means
wafer storage
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18000285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18000285U priority Critical patent/JPS6289143U/ja
Publication of JPS6289143U publication Critical patent/JPS6289143U/ja
Pending legal-status Critical Current

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Landscapes

  • Packaging Frangible Articles (AREA)
JP18000285U 1985-11-22 1985-11-22 Pending JPS6289143U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18000285U JPS6289143U (fr) 1985-11-22 1985-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18000285U JPS6289143U (fr) 1985-11-22 1985-11-22

Publications (1)

Publication Number Publication Date
JPS6289143U true JPS6289143U (fr) 1987-06-08

Family

ID=31123559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18000285U Pending JPS6289143U (fr) 1985-11-22 1985-11-22

Country Status (1)

Country Link
JP (1) JPS6289143U (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01230246A (ja) * 1987-11-06 1989-09-13 Tel Sagami Ltd 半導体ウェハの移し換え方法及び半導体ウェハの移し換え装置並びに半導体ウェハの熱処理ボート
JPH01250839A (ja) * 1988-03-31 1989-10-05 Tokyo Electron Ltd Ｌｃｄ基板の検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01230246A (ja) * 1987-11-06 1989-09-13 Tel Sagami Ltd 半導体ウェハの移し換え方法及び半導体ウェハの移し換え装置並びに半導体ウェハの熱処理ボート
JPH01250839A (ja) * 1988-03-31 1989-10-05 Tokyo Electron Ltd Ｌｃｄ基板の検査装置

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