JPS6286054U - - Google Patents
Info
- Publication number
- JPS6286054U JPS6286054U JP17754085U JP17754085U JPS6286054U JP S6286054 U JPS6286054 U JP S6286054U JP 17754085 U JP17754085 U JP 17754085U JP 17754085 U JP17754085 U JP 17754085U JP S6286054 U JPS6286054 U JP S6286054U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- ion
- rotation
- disks
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 description 4
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17754085U JPS6286054U (de) | 1985-11-18 | 1985-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17754085U JPS6286054U (de) | 1985-11-18 | 1985-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6286054U true JPS6286054U (de) | 1987-06-01 |
Family
ID=31118832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17754085U Pending JPS6286054U (de) | 1985-11-18 | 1985-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6286054U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012169270A (ja) * | 2011-02-09 | 2012-09-06 | Leica Mikrosysteme Gmbh | 試料作製のための装置及び方法 |
| JP2016511524A (ja) * | 2013-03-13 | 2016-04-14 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | 回転プラテン装置および回転ユニオン |
-
1985
- 1985-11-18 JP JP17754085U patent/JPS6286054U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012169270A (ja) * | 2011-02-09 | 2012-09-06 | Leica Mikrosysteme Gmbh | 試料作製のための装置及び方法 |
| JP2016511524A (ja) * | 2013-03-13 | 2016-04-14 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | 回転プラテン装置および回転ユニオン |