JPS6283467A - パレツト移動型スパツタリング装置 - Google Patents

パレツト移動型スパツタリング装置

Info

Publication number
JPS6283467A
JPS6283467A JP22538485A JP22538485A JPS6283467A JP S6283467 A JPS6283467 A JP S6283467A JP 22538485 A JP22538485 A JP 22538485A JP 22538485 A JP22538485 A JP 22538485A JP S6283467 A JPS6283467 A JP S6283467A
Authority
JP
Japan
Prior art keywords
vacuum chamber
substrate
sputtering
pallet
pallet moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22538485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0576542B2 (OSRAM
Inventor
Yoshiteru Murakami
善照 村上
Akira Takahashi
明 高橋
Kenji Oota
賢司 太田
Michinobu Saegusa
理伸 三枝
Tomoyuki Miyake
知之 三宅
Kazuo Ban
和夫 伴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP22538485A priority Critical patent/JPS6283467A/ja
Publication of JPS6283467A publication Critical patent/JPS6283467A/ja
Publication of JPH0576542B2 publication Critical patent/JPH0576542B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP22538485A 1985-10-09 1985-10-09 パレツト移動型スパツタリング装置 Granted JPS6283467A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22538485A JPS6283467A (ja) 1985-10-09 1985-10-09 パレツト移動型スパツタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22538485A JPS6283467A (ja) 1985-10-09 1985-10-09 パレツト移動型スパツタリング装置

Publications (2)

Publication Number Publication Date
JPS6283467A true JPS6283467A (ja) 1987-04-16
JPH0576542B2 JPH0576542B2 (OSRAM) 1993-10-22

Family

ID=16828509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22538485A Granted JPS6283467A (ja) 1985-10-09 1985-10-09 パレツト移動型スパツタリング装置

Country Status (1)

Country Link
JP (1) JPS6283467A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147061A (ja) * 1987-12-02 1989-06-08 Sharp Corp パレット移動型スパッタリング装置
JPH02115366A (ja) * 1988-10-25 1990-04-27 Sumitomo Special Metals Co Ltd スパッタリング装置
JP2007113112A (ja) * 2005-10-21 2007-05-10 Samsung Sdi Co Ltd 薄膜蒸着装置及びそれを用いた薄膜蒸着方法
JP2013134986A (ja) * 2011-12-23 2013-07-08 Wonik Ips Co Ltd 基板処理装置及びそれを有する基板処理システム
JP2015518521A (ja) * 2012-04-12 2015-07-02 カーベーアー−ノタシ ソシエテ アノニム 凹版印刷版コーティング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57180756U (OSRAM) * 1981-05-08 1982-11-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57180756U (OSRAM) * 1981-05-08 1982-11-16

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147061A (ja) * 1987-12-02 1989-06-08 Sharp Corp パレット移動型スパッタリング装置
JPH02115366A (ja) * 1988-10-25 1990-04-27 Sumitomo Special Metals Co Ltd スパッタリング装置
JP2007113112A (ja) * 2005-10-21 2007-05-10 Samsung Sdi Co Ltd 薄膜蒸着装置及びそれを用いた薄膜蒸着方法
JP2013134986A (ja) * 2011-12-23 2013-07-08 Wonik Ips Co Ltd 基板処理装置及びそれを有する基板処理システム
JP2015518521A (ja) * 2012-04-12 2015-07-02 カーベーアー−ノタシ ソシエテ アノニム 凹版印刷版コーティング装置
JP2018058374A (ja) * 2012-04-12 2018-04-12 カーベーアー−ノタシ ソシエテ アノニム 凹版印刷版コーティング装置
US9970096B2 (en) 2012-04-12 2018-05-15 Kba-Notasys Sa Intaglio printing plate coating apparatus

Also Published As

Publication number Publication date
JPH0576542B2 (OSRAM) 1993-10-22

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