JPS6282561U - - Google Patents
Info
- Publication number
- JPS6282561U JPS6282561U JP17353585U JP17353585U JPS6282561U JP S6282561 U JPS6282561 U JP S6282561U JP 17353585 U JP17353585 U JP 17353585U JP 17353585 U JP17353585 U JP 17353585U JP S6282561 U JPS6282561 U JP S6282561U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- signals
- evacuation control
- logical
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の一実施例の真空ゲージが２つ
の培合の比較を示す説明図、第２図は、イオン打
込装置の真空構成を示す図である。 １…イオン源、２…分離部、２３…イオンゲー
ジ、２５…制御装置。
の培合の比較を示す説明図、第２図は、イオン打
込装置の真空構成を示す図である。 １…イオン源、２…分離部、２３…イオンゲー
ジ、２５…制御装置。
Claims (1)
- 真空検出器の信号によつて、真空排制御を行う
システムにおいて、真空検出器を２つ以上使用し
、該Ｎ個の出力信項の論理和の信号によつて排気
制御を行う如く構成したことを特徴とする真空排
気制御装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17353585U JPS6282561U (ja) | 1985-11-13 | 1985-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17353585U JPS6282561U (ja) | 1985-11-13 | 1985-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6282561U true JPS6282561U (ja) | 1987-05-26 |
Family
ID=31111084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17353585U Pending JPS6282561U (ja) | 1985-11-13 | 1985-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6282561U (ja) |
-
1985
- 1985-11-13 JP JP17353585U patent/JPS6282561U/ja active Pending