JPS6251169U - - Google Patents
Info
- Publication number
- JPS6251169U JPS6251169U JP14338585U JP14338585U JPS6251169U JP S6251169 U JPS6251169 U JP S6251169U JP 14338585 U JP14338585 U JP 14338585U JP 14338585 U JP14338585 U JP 14338585U JP S6251169 U JPS6251169 U JP S6251169U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum chamber
- gauge
- chamber
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案真空装置の一実施例の概略系統
図である。 ＩＧ……真空計、ＶＣ……真空室（蒸着室）、
Ｖ３０……弁。
図である。 ＩＧ……真空計、ＶＣ……真空室（蒸着室）、
Ｖ３０……弁。
Claims (1)
- 真空室と、該真空室内の真空度を測定する真空
計を備えた真空装置において、該真空室と該真空
計との間に、開閉弁が設けられていることを特徴
とする真空装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14338585U JPS6251169U (ja) | 1985-09-19 | 1985-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14338585U JPS6251169U (ja) | 1985-09-19 | 1985-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6251169U true JPS6251169U (ja) | 1987-03-30 |
Family
ID=31053020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14338585U Pending JPS6251169U (ja) | 1985-09-19 | 1985-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6251169U (ja) |
-
1985
- 1985-09-19 JP JP14338585U patent/JPS6251169U/ja active Pending