JPS6280351U - - Google Patents
Info
- Publication number
- JPS6280351U JPS6280351U JP17287685U JP17287685U JPS6280351U JP S6280351 U JPS6280351 U JP S6280351U JP 17287685 U JP17287685 U JP 17287685U JP 17287685 U JP17287685 U JP 17287685U JP S6280351 U JPS6280351 U JP S6280351U
- Authority
- JP
- Japan
- Prior art keywords
- trench
- insulator
- lie
- drain region
- wall surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17287685U JPS6280351U (lv) | 1985-11-09 | 1985-11-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17287685U JPS6280351U (lv) | 1985-11-09 | 1985-11-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6280351U true JPS6280351U (lv) | 1987-05-22 |
Family
ID=31109814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17287685U Pending JPS6280351U (lv) | 1985-11-09 | 1985-11-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6280351U (lv) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53115183A (en) * | 1977-03-18 | 1978-10-07 | Toshiba Corp | Production of semiconductor device |
JPS53130986A (en) * | 1977-04-20 | 1978-11-15 | Matsushita Electric Ind Co Ltd | Semiconductor device and its manufacture |
JPS5485686A (en) * | 1977-12-20 | 1979-07-07 | Matsushita Electric Ind Co Ltd | Semiconductor integrated circuit device |
-
1985
- 1985-11-09 JP JP17287685U patent/JPS6280351U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53115183A (en) * | 1977-03-18 | 1978-10-07 | Toshiba Corp | Production of semiconductor device |
JPS53130986A (en) * | 1977-04-20 | 1978-11-15 | Matsushita Electric Ind Co Ltd | Semiconductor device and its manufacture |
JPS5485686A (en) * | 1977-12-20 | 1979-07-07 | Matsushita Electric Ind Co Ltd | Semiconductor integrated circuit device |