JPS6280338U - - Google Patents
Info
- Publication number
- JPS6280338U JPS6280338U JP1985172342U JP17234285U JPS6280338U JP S6280338 U JPS6280338 U JP S6280338U JP 1985172342 U JP1985172342 U JP 1985172342U JP 17234285 U JP17234285 U JP 17234285U JP S6280338 U JPS6280338 U JP S6280338U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- heat treatment
- boat
- groove
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985172342U JPH0337231Y2 (enExample) | 1985-11-11 | 1985-11-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985172342U JPH0337231Y2 (enExample) | 1985-11-11 | 1985-11-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6280338U true JPS6280338U (enExample) | 1987-05-22 |
| JPH0337231Y2 JPH0337231Y2 (enExample) | 1991-08-07 |
Family
ID=31108797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985172342U Expired JPH0337231Y2 (enExample) | 1985-11-11 | 1985-11-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0337231Y2 (enExample) |
-
1985
- 1985-11-11 JP JP1985172342U patent/JPH0337231Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0337231Y2 (enExample) | 1991-08-07 |
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