JPH0468520U - - Google Patents

Info

Publication number
JPH0468520U
JPH0468520U JP1990111529U JP11152990U JPH0468520U JP H0468520 U JPH0468520 U JP H0468520U JP 1990111529 U JP1990111529 U JP 1990111529U JP 11152990 U JP11152990 U JP 11152990U JP H0468520 U JPH0468520 U JP H0468520U
Authority
JP
Japan
Prior art keywords
boat
groove rods
quartz
wafers
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1990111529U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990111529U priority Critical patent/JPH0468520U/ja
Publication of JPH0468520U publication Critical patent/JPH0468520U/ja
Pending legal-status Critical Current

Links

JP1990111529U 1990-10-24 1990-10-24 Pending JPH0468520U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990111529U JPH0468520U (enExample) 1990-10-24 1990-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990111529U JPH0468520U (enExample) 1990-10-24 1990-10-24

Publications (1)

Publication Number Publication Date
JPH0468520U true JPH0468520U (enExample) 1992-06-17

Family

ID=31858993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990111529U Pending JPH0468520U (enExample) 1990-10-24 1990-10-24

Country Status (1)

Country Link
JP (1) JPH0468520U (enExample)

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