JPS6278753U - - Google Patents
Info
- Publication number
- JPS6278753U JPS6278753U JP16993985U JP16993985U JPS6278753U JP S6278753 U JPS6278753 U JP S6278753U JP 16993985 U JP16993985 U JP 16993985U JP 16993985 U JP16993985 U JP 16993985U JP S6278753 U JPS6278753 U JP S6278753U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- semiconductor wafer
- semiconductor
- wafers
- reinforcing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985169939U JPH0220830Y2 (OSRAM) | 1985-11-05 | 1985-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985169939U JPH0220830Y2 (OSRAM) | 1985-11-05 | 1985-11-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6278753U true JPS6278753U (OSRAM) | 1987-05-20 |
| JPH0220830Y2 JPH0220830Y2 (OSRAM) | 1990-06-06 |
Family
ID=31104203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985169939U Expired JPH0220830Y2 (OSRAM) | 1985-11-05 | 1985-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220830Y2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114938U (OSRAM) * | 1989-03-03 | 1990-09-14 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56165317A (en) * | 1980-05-26 | 1981-12-18 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1985
- 1985-11-05 JP JP1985169939U patent/JPH0220830Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56165317A (en) * | 1980-05-26 | 1981-12-18 | Fujitsu Ltd | Manufacture of semiconductor device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114938U (OSRAM) * | 1989-03-03 | 1990-09-14 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220830Y2 (OSRAM) | 1990-06-06 |