JPS6277195A - Method and device for discriminating working state by energy beam - Google Patents

Abstract

PURPOSE:To discriminate a working state easily, quickly and in a short time by detecting by a sensor an infrared ray, a thermion, etc. which are generated from a molten object in the periphery of a working hole, and discriminating a piercing working state, when irradiating a high energy beam. CONSTITUTION:Piercing working is executed to an object to be worked, by using a high energy beam 3 outputted from a high energy beam generating device 1, based on a command of an output control device 2. In this case, when executing the piercing working, an infrared ray and a thermion 6 which are generated from a molten object in the periphery of a working hole 5 are detected by a sensor 7. Subsequently, a working state discriminating device 8 discriminates a piercing working state based on a trigger signal 9 from the control device 2 and a detecting signal 13 from the sensor 7. In this way, the working state can be discriminated easily, quickly and also in a short time by a non-contact system.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for determining the state of drilling by an electron beam such as a laser beam, or a high-energy beam such as an ion beam, and a device for determining the same. It is.

[Conventional technology]

FIGS. 4(A), 4(B), and 4(C) are process diagrams for explaining a conventional method for determining the drilling state. Step (A) shows a state in which a machined hole (5) with a predetermined inner diameter is formed at a predetermined position of a plate-shaped workpiece (4) using a high-energy beam (3), and step (B) , machined hole (5
) and its surroundings, cut the workpiece (
4) is cut and the cut surface is polished using a cutting and polishing tool Ql) to make it easier to observe. Further, in step (C), the drilling state of the cut surface including the machined hole (5) of the workpiece (4), for example, the adhesion state of melted material around the machined hole (5), etc., is measured using an optical instrument such as a microscope (
6), etc., and the state of discrimination is shown.

[Problem that the invention seeks to solve]

According to the conventional drilling state determination method described above, in order to visually determine the drilling state of the cut surface of the workpiece (4) including the machined hole (5), the cutting and polishing tool a or Since the machined hole part of the workpiece (4) must be cut by cutting, it not only takes a considerable amount of time to determine the machining state, but also the cut workpiece (4) must be cut in order to determine the machining state by sampling. Product (4) not only cannot be used as a product, but also has many problems, such as the difficulty of automating the work of determining the processing state.

This invention was made with attention to this point, and unlike the above-mentioned conventional method, the workpiece is not cut.
It is an object of the present invention to provide a machining state determination method and a determination device that can easily, quickly, and quickly determine the machining state.

[Means for solving problems]

The method and device for determining the machining state using an energy beam according to the present invention uses a sensor to detect infrared rays and thermionic electrons generated from the molten material around the drilled hole during drilling using a high-energy beam, and detects the intensity and The drilling process status is determined based on changes over time.

[For production]

In this invention, the drilling state is determined by detecting infrared rays and thermoelectrons generated from the molten material around the hole in the workpiece using a sensor.
Unlike the conventional method, there is no need to cut the workpiece, and the processing state can be determined simply, quickly, and in a short time using a non-contact method.

[Embodiments of the invention]

1 to 6 each show an embodiment of the present invention. FIG. 1 is a block diagram showing a machining state discrimination device using a high-energy beam, and FIG. 2 is a block diagram showing a machining state discrimination method of the present invention. FIG. 6 is a waveform diagram for explaining the operation, and a sectional view of the workpiece for explaining the discrimination operation by the processing discrimination method of the present invention.

First, in the block diagram of Fig. 1, (1) is a high-energy beam generator, and (2) is a trigger signal ( (9) an output control device that outputs (3)
is a high-energy beam output from a high-energy beam generator (1) and irradiated to form a machined hole (5) in a workpiece (4), and (6) is a high-energy beam that is used to melt the area around the machined hole (5). Infrared rays and thermoelectrons generated from objects, (7) are machined holes (
5) is a sensor that detects the intensity and temporal changes of infrared rays and thermoelectrons, and (8) receives a tri-force signal (9) from the output controller (2) and a sensor (7). This is a machining state discriminating device that determines the drilling machining state based on the detection signal α].

The machining state discriminating device using an energy beam according to the present invention is constructed as described above, and the machining state discriminating device according to the present invention will be explained with reference to the waveform diagram of the second factor and the cross section of the workpiece shown in FIG.

First, the high-energy beam generator k (1
), a predetermined command is output from the output control device (2), and a high-energy beam (3) having a beam intensity waveform as shown in FIG. 2(A) is generated as shown in FIG. 6(A). When the workpiece (4) is irradiated with radiation, a machined hole (5) of a predetermined size is formed at a predetermined position on the workpiece (4).As soon as the formation of the machined hole is completed, the output is controlled. Device (
2) outputs a tri-force signal (9) as shown in Fig. 2 (BJ) at the same time as the irradiation of the high-energy beam (3) ends. (
7), as shown in FIGS. 6(B) and (C), detects infrared rays and thermionic electrons (6) generated from the melt αQ around the machined hole (5), and converts the infrared rays and rA electrons ( 6
) and the detection signal portion of the temporal change are output to the machining state discriminator & (8).

Figure (B) shows a case where the molten material (ICI 12) around the machined hole (5) is small and the machining condition is good, and a case where the machining condition is good because the amount of the molten material α1 is large is shown in Figure (B). A defective case is shown in FIG. 6(C), and the intensity and temporal change of the infrared rays and heat generated from the melt 01 (6) depend on the amount and temperature of the melt 01. Since the sensor (force and machining state discriminator (8)) are different, it is possible to determine the drilling state by detecting this using the sensor (force and machining state discriminator (8)). 7
) shows an example of the waveform of the detection signal Ql in Figure 2 (
C) shows the waveform when the drilling condition is good as shown in Figure 3 (B), and the waveform in Figure 2) shows the waveform in Figure 6 (
The waveform shown in C) shows a waveform when the drilling state is poor, and the waveform when the drilling state is good with a small amount of melt α1 (Fig. 2(C)) is the waveform when the drilling state is poor, as shown in Fig. 2(C). The sensor output after the trigger signal is small and the output decreases rapidly compared to the waveform with a poor drilling state [Figure 2 [present]], whereas the waveform with a large amount of melt 00 [2nd
Figure (D) shows a gradual decrease in output. To give an example of the difference in the state of output reduction, the time Tc from the trigger signal until the sensor output becomes "0" is shown in Fig. 2 (C).
.

In the above-mentioned embodiment, the sensor (7) is connected to the high-energy beam (4) of the workpiece (4) as shown in FIG.
Although the case of 3) where it is disposed on the irradiated surface side has been described, the same effect can be obtained even if it is disposed on the opposite side of the irradiated surface. Furthermore, in the above-mentioned embodiment, a case was described in which the sensor (7) detects infrared rays and thermoelectrons, but the invention is not limited to this. The same effect can be obtained. Furthermore, we have described the decay time T of the sensor output as an example of a parameter for determining the quality of the drilling process, but this
It goes without saying that similar effects can be achieved with other parameters such as the absolute value of the sensor output. Furthermore, in the above-described embodiment, the machined hole (
Although the case in which only the quality determination in 5) is performed has been described, it is also possible, for example, to feed back information from the machining state determination device (8) to the output control device (2) to stabilize the drilling machining state.

〔Effect of the invention〕

As described above, according to the present invention, when drilling with a high-energy beam, a sensor detects infrared rays and thermoelectrons generated from the molten material around the drilled hole, and the processing state can be determined from the intensity and temporal changes. Since the device determines the drilling status, there is no need to cut the workpiece to determine the drilling status as in the past, and it is possible to easily, quickly and quickly determine the drilling status using a non-contact method. This method not only enables discrimination, but also has the excellent effect of automating the work of discriminating processing conditions.

[Brief explanation of drawings]

Figures 1 to 6 all show one embodiment of the present invention. Figure 1 is a block diagram showing a machining state discrimination device using a high-energy beam, and Figures 2 (4) to (D) are block diagrams of this device. Waveform diagrams for explaining the operation of the machining discrimination method of the invention, FIGS. A)～
(C) is a process diagram for explaining a conventional method for determining the drilling state. In the figure, (1) is a high-energy beam generator, (2
) is the output control device, (3) #'i high energy beam,
(4) is the workpiece, (5) is the machined hole, (6) is infrared rays and thermoelectrons, (7) is the sensor, (8) is the processing state discriminator, (9) is the trigger signal, (2) is This is a sensor detection signal. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (2)

[Claims] (1) During drilling using a high-energy beam, a sensor detects infrared rays, thermoelectrons, visible light, etc. generated from the molten material around the drilled hole, and the drilling status is determined from the intensity and temporal changes. A method for determining machining status using an energy beam, characterized in that: (2) A high-energy beam generator that irradiates the workpiece with a high-energy beam, and detects infrared rays, thermoelectrons, visible light, etc. generated from the molten material around the machined hole formed by the high-energy beam. A sensor, an output control device that controls the high-energy beam output and generates a trigger signal when the energy beam output is instantaneously reduced, and a hole-drilling process using the detection signal of the sensor and the trigger signal. 1. A machining state discriminating device using an energy beam, comprising: a machining state discriminating device for discriminating a state.