JPS627692B2 - - Google Patents

Info

Publication number
JPS627692B2
JPS627692B2 JP57156254A JP15625482A JPS627692B2 JP S627692 B2 JPS627692 B2 JP S627692B2 JP 57156254 A JP57156254 A JP 57156254A JP 15625482 A JP15625482 A JP 15625482A JP S627692 B2 JPS627692 B2 JP S627692B2
Authority
JP
Japan
Prior art keywords
etching
mask
monitor pattern
alignment
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57156254A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5944827A (ja
Inventor
Akihisa Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57156254A priority Critical patent/JPS5944827A/ja
Publication of JPS5944827A publication Critical patent/JPS5944827A/ja
Publication of JPS627692B2 publication Critical patent/JPS627692B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Weting (AREA)
JP57156254A 1982-09-06 1982-09-06 半導体装置の製造方法 Granted JPS5944827A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57156254A JPS5944827A (ja) 1982-09-06 1982-09-06 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57156254A JPS5944827A (ja) 1982-09-06 1982-09-06 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5944827A JPS5944827A (ja) 1984-03-13
JPS627692B2 true JPS627692B2 (enrdf_load_html_response) 1987-02-18

Family

ID=15623764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57156254A Granted JPS5944827A (ja) 1982-09-06 1982-09-06 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5944827A (enrdf_load_html_response)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5976980A (en) * 1994-11-23 1999-11-02 Intel Corporation Method and apparatus providing a mechanical probe structure in an integrated circuit die
US6153891A (en) * 1994-11-23 2000-11-28 Intel Corporation Method and apparatus providing a circuit edit structure through the back side of an integrated circuit die
US6020746A (en) * 1994-11-23 2000-02-01 Intel Corporation Method and apparatus for probing an integrated circuit through the back side of an integrated circuit die
US5952247A (en) * 1994-11-23 1999-09-14 Intel Corporation Method of accessing the circuitry on a semiconductor substrate from the bottom of the semiconductor substrate
US5904486A (en) * 1997-09-30 1999-05-18 Intel Corporation Method for performing a circuit edit through the back side of an integrated circuit die
US6309897B1 (en) 1997-09-30 2001-10-30 Intel Corporation Method and apparatus providing a circuit edit structure through the back side of an integrated circuit die
US6159754A (en) * 1998-05-07 2000-12-12 Intel Corporation Method of making a circuit edit interconnect structure through the backside of an integrated circuit die
US6692995B2 (en) 2002-04-05 2004-02-17 Intel Corporation Physically deposited layer to electrically connect circuit edit connection targets

Also Published As

Publication number Publication date
JPS5944827A (ja) 1984-03-13

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