JPS6276550U - - Google Patents

Info

Publication number
JPS6276550U
JPS6276550U JP1986170472U JP17047286U JPS6276550U JP S6276550 U JPS6276550 U JP S6276550U JP 1986170472 U JP1986170472 U JP 1986170472U JP 17047286 U JP17047286 U JP 17047286U JP S6276550 U JPS6276550 U JP S6276550U
Authority
JP
Japan
Prior art keywords
light
semiconductor device
under test
emitting semiconductor
device under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986170472U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986170472U priority Critical patent/JPS6276550U/ja
Publication of JPS6276550U publication Critical patent/JPS6276550U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1986170472U 1986-11-06 1986-11-06 Pending JPS6276550U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986170472U JPS6276550U (enExample) 1986-11-06 1986-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986170472U JPS6276550U (enExample) 1986-11-06 1986-11-06

Publications (1)

Publication Number Publication Date
JPS6276550U true JPS6276550U (enExample) 1987-05-16

Family

ID=31105234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986170472U Pending JPS6276550U (enExample) 1986-11-06 1986-11-06

Country Status (1)

Country Link
JP (1) JPS6276550U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03145127A (ja) * 1989-10-31 1991-06-20 Toshiba Corp エッチング深さ測定装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924685A (enExample) * 1972-07-03 1974-03-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924685A (enExample) * 1972-07-03 1974-03-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03145127A (ja) * 1989-10-31 1991-06-20 Toshiba Corp エッチング深さ測定装置

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